Aerotech HexGen Hexapod Six DOF Positioning System

Overview

Aerotech’s HEX500-350HL hexapod is ideal for applications in x-ray diffraction, sensor testing, high-force device manipulation, synchrotron sample or optics adjustment, semiconductor manufacturing and inspection, or satellite sensor testing. The HEX500-350HL provides up to ±0.5 µm linear/±2.5 µrad angular positioning accuracy and 20 nm linear/0.2 µrad angular positioning resolution.