MPS50SL Miniature Mechanical-Bearing Screw-Driven Linear Stage

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Description

Design Features

Compact 50 mm width with travel to 50 mm
Precision ground ball-screw or lead-screw drive
DC servo or stepper motor
Crossed-roller bearings
High resolution (0.1 µm), repeatability (±0.75 µm), and accuracy (±1.5 µm)
High vacuum capable
Compact multi-axis configurations

The MPS50SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly in space-constrained applications.

High Accuracy

The precision ground ball-screw or lead screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The crossed-roller linear bearings provide smooth travel and excellent payload characteristics.

Optional Vacuum Preparation

The MPS50SL is available with optional vacuum preparation to 10^-6 Torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.

Highly Configurable

An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be directly mounted to the larger MPS75SL stage.

The MPS50SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.

Specifications

Mechanical Specifications

Model			MPS50SL-025	MPS50SL-050
Travel			25 mm	50 mm
Accuracy	1.0 mm/rev Ball Screw	Uncalibrated	±3.0 µm	±4.0 µm
	1.0 mm/rev Ball Screw	Calibrated⁽¹⁾	±1.5 µm	±1.5 µm
	0.5 mm/rev Lead Screw	Uncalibrated	±5.0 µm	±7.5 µm
	0.5 mm/rev Lead Screw	Calibrated⁽¹⁾	±2.0 µm	±2.5 µm
Resolution (Minimum Incremental Motion)	1.0 mm/rev Ball Screw		0.1 µm	0.1 µm
Resolution (Minimum Incremental Motion)	0.5 mm/rev Lead Screw		0.1 µm	0.1 µm
Repeatability (Bidirectional)⁽¹⁾	1.0 mm/rev Ball Screw		±0.75 µm	±0.75 µm
Repeatability (Bidirectional)⁽¹⁾	0.5 mm/rev Lead Screw		±1.5 µm	±1.5 µm
Straightness			±2.0 µm	±3.0 µm
Flatness			±2.0 µm	±3.0 µm
Maximum Speed	1.0 mm/rev Ball Screw	DC Motor (-M1)	5 mm/s	5 mm/s
	1.0 mm/rev Ball Screw	Stepper Motor (-M2)	1 mm/s	1 mm/s
	0.5 mm/rev Lead Screw	DC Motor (-M1)	2.5 mm/s	2.5 mm/s
	0.5 mm/rev Lead Screw	Stepper Motor (-M2)	0.5 mm/s	0.5 mm/s
Load Capacity⁽²⁾	Horizontal		5 kg	5 kg
	Side		5 kg	5 kg
	Vertical		2.5 kg	2.5 kg
Stage Mass			0.85 kg	0.9 kg
Material			Anodized Aluminum Body

With Aerotech controllers.
Payload specifications are single-axis system.
Excessive duty cycle may impact stage accuracy.
Specifications are for single-axis systems measured 25 mm above the tabletop.

Electrical Specifications

Model		DC Motor (-M1) (Standard and VAC)	Stepper Motor (-M2) (Standard and VAC)
Drive System		DC Brush Servomotor with 14:1 Gearbox	24 VDC Bipolar Stepper Motor with 43:1 Gearbox
Feedback		512 lines/rev Rotary Encoder	N/A
Electronic Resolution	1.0 mm/rev Ball Screw	0.0348 µm	0.0484 µm @ 480 steps/rev Motor Resolution
Electronic Resolution	0.5 mm/rev Lead Screw	0.0174 µm	0.0242 µm @ 480 steps/rev Motor Resolution
Maximum Bus Voltage		48 VDC	48 VDC*
Limit Switches		5 V, Normally Closed	5 V, Normally Closed

*With Aerotech control system.

Recommended Controller

Model
Multi-Axis	A3200	Npaq/Npaq MR/Ndrive MP
Multi-Axis	Ensemble	Ensemble LAB /Epaq/Epaq MR/Ensemble MP
Single Axis	Soloist	Soloist MP

MPS50SL Load Curves

Dimensions

MPS50SL
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MPS50SL Mounting Plates
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MPS50SL Mounting Bracket
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Ordering Information