PlanarDL Two Axis, Mechanical Bearing, Linear-Motor Stage

Description

Design Features

  • Integrated, low-profile, XY, linear-motor stage
  • Excellent geometric performance (straightness to ±0.4 µm; flatness to ±1 µm)
  • Anti-creep, precision crossed-roller bearings
  • Large selection – nine models in travel and accuracy
  • Get details on our Order-to-Ship Program that could have this product shipped to you in two weeks

Aerotech’s PlanarDL-series stages offer excellent geometric and dynamic performance in a compact, low-profile package. A variety of travel and performance options make this stage ideal for applications ranging from surface profilometry to LED wafer scribing.

Superior Stage Design

The PlanarDL XY design allows for unparalleled planar geometric performance in applications where straightness and flatness of motion are critical. High-precision anti-creep crossed-roller bearings, precision-machined surfaces and Aerotech linear motors driving through the axes’ center-of-stiffness result in a positioning stage with exceptional geometric tolerances.

The PlanarDL structural elements are optimized for high-dynamics and high-stiffness for the most demanding dynamic applications. Capable of achieving 1 m/s velocities and 1.5 g accelerations, the PlanarDL enables high-throughput, high-accuracy processing resulting in superior process yield and a low total cost of ownership. Unlike competitive products using recirculating bearings, the anti-creep crossed-roller bearings used in this design permit smooth motion making this an ideal stage solution for challenging scanning applications.

Noncontact Direct-Drive Technology

Only noncontact, direct-drive technology offers high-speed and accurate positioning coupled with maintenance-free operation and long service life. At the heart of the PlanarDL is Aerotech’s proprietary direct-drive technology. This drive technology allows for unmatched performance compared to other competitive screw-based and linear motor designs.

The PlanarDL-200XY and -300XY stages are both available with one or two motors per axis, allowing optimization of each individual axis for the specific application and process. Regardless of the number of motors selected, the resulting drive force acts through the centers of friction and stiffness resulting in superior geometric performance and accuracy.

Integrated Cable Management

The cable management system on the PlanarDL is integrated into the stage and optimized for long life and performance. Additional standard options are available for extra servo axes or air/vacuum lines for vacuum chucks or other process pneumatics.

Extreme Positioning Performance

The PlanarDL is available in three positioning performance options. Relying upon decades of experience in system-level design including not only positioning mechanics, but also software and electronics, Aerotech has developed advanced technologies to push the envelope of precision. High-performance -PLUS and -ULTRA options are available to enable accuracies and straightness values down to ±400 nm and orthogonality down to 1 arc second.

Specifications

Mechanical Specifications

 PlanarDL-100XYPlanarDL-200XYPlanarDL-300XY
Performance Grade - PLUS(1) ULTRA(1) - PLUS(1) ULTRA(1) - PLUS(1) ULTRA(1)
Travel 100 mm x 100 mm 200 mm x 200 mm 300 mm x 300 mm
Accuracy ±3
µm
±0.4
µm
±0.4
µm
±4
µm
±0.5
µm
±0.5
µm
±5
µm
±0.75
µm
±0.75
µm
Bidirectional Repeatability(2) ±0.1 µm
Resolution
(Minimum Incremental Motion)
3 nm
Straightness ±1 µm ±0.4 µm ±1.5 µm ±0.5 µm ±2 µm ±0.75 µm
Flatness ±1 µm ±1.5 µm ±2 µm
Pitch 12 arc sec 15 arc sec 18 arc sec
Roll 12 arc sec 15 arc sec 18 arc sec
Yaw 6 arc sec 8 arc sec 10 arc sec
Orthogonality 20 arc sec 5 arc sec 1 arc sec 20 arc sec 5 arc sec 1 arc sec 20 arc sec 5 arc sec 1 arc sec
Maximum Speed 500 mm/s 750 mm/s 1000 mm/s
Maximum Acceleration
(No Load; Upper Axis)
1.5 g (No Load) 1.0 g (X1 Motor)
1.5 g (X2 Motors)
1.0 g (X1 Motor)
1.5 g (X2 Motors)
Maximum Force (Continuous) 26 N 31 N (X1 Motor)
62 N (X2 Motors)
78 N (X1 Motor)
156 N (X2 Motors)
Load Capacity(3) Horizontal 15 kg 20 kg 30 kg
Moving Mass Upper Axis 2.9 kg 6.3 kg (-UX1 Motor)
7.4 kg (-UX2 Motor)
16.3 kg (-UX1 Motor)
19.1 kg (-UX2 Motor)
Lower Axis 8.4 kg 16.8 kg (-LX1-UX1 Motor)
17.8 kg (-LX1-UX2 or -LX2-UX1 Motor)
19.0 kg (-LX2-UX2 Motors)
45.0 kg (-LX1-UX1 Motor)
48.1 kg (-LX1-UX2 or -LX2-UX1 Motor)
50.9 kg (-LX2-UX2 Motors)
Stage Mass(4) 11 kg 23-25 kg 53-63 kg
Material Black Anodized Aluminum
MTBF (Mean Time Between Failure) 30,000 Hours
  1. The -PLUS and -ULTRA options require the use of an Aerotech controller.
  2. Repeatability specification assumes a feedback resolution of 20 nm or less.
  3. On-axis loading for orientation listed.
  4. Stage mass a function of motor configuration.
  5. Specifications for Base and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.

Electrical Specifications

 PlanarDL-100XYPlanarDL-200XYPlanarDL-300XY
Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage 320 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center of XY Travel

Recommended Controller

Multi-Axis A3200 Ndrive CP
Ndrive HLe/HPe
Npaq
Ensemble Ensemble CP
Ensemble HLe/HPe
Single Axis Soloist Soloist CP
Soloist HLe/HPe
    • PlanarDL Load Curves

    Dimensions

    • PlanarDL-100XY-CMS0
    • PlanarDL-100XY-CMS1/2
    • PlanarDL-200XY-CMS0
    • PlanarDL-200XY-CMS1/2
    • PlanarDL-300XY-CMS0
    • PlanarDL-300XY-CMS1/2

    Ordering Information

    PlanarDL-series XY Stage

    OptionDescription
    PlanarDL-100XY Linear motor XY table; 100 mm x 100 mm travel
    PlanarDL-200XY Linear motor XY table; 200 mm x 200 mm travel
    PlanarDL-300XY Linear motor XY table; 300 mm x 300 mm travel

    CMS Options (Required)

    OptionDescription
    -CMS0 No cable management for third axis on top of XY
    -CMS1 Cable management for air/vacuum line for vacuum chuck or process pneumatics
    -CMS2 Cable management for motor/feedback and air/vacuum line for third axis on top of the XY

    Motor Configuration (Required) - Not Applicable for PlanarDL-100XY

    OptionDescription
    -LX1-UX1 1 motor on lower-axis; 1 motor on upper-axis
    -LX1-UX2 1 motor on lower-axis; 2 motors on upper-axis
    -LX2-UX1 2 motors on lower-axis; 1 motor on upper-axis
    -LX2-UX2 2 motors on lower-axis; 2 motors on upper-axis

    Lower-Axis Encoder (Required)

    OptionDescription
    -L-LTAS Lower-axis glass-scale linear encoder; amplified sine output 1 Vpp (20 µm signal period)
    -L-LTX50 Lower-axis glass-scale linear encoder; 0.1 µm line-driver output after quadrature

    Upper-Axis Encoder (Required)

    OptionDescription
    -U-LTAS Upper-axis glass-scale linear encoder; amplified sine output 1 Vpp (20 µm signal period)
    -U-LTX50 Upper-axis glass-scale linear encoder; 0.1 µm line-driver output after quadrature

    Performance (Optional) - Requires Aerotech Controller

    OptionDescription
    -PLUS High-accuracy performance option
    -ULTRA Ultra-high accuracy 2D performance option