PlanarSL Two Axis, Mechanical Bearing, Ball-Screw Stage
Our PlanarSL mechanical bearing, ball-screw-driven XY stages offer exceptional performance in a cost-effective, low-profile form factor. Combining two axes of motion in a compact package, the PlanarSL is the perfect solution for applications ranging from surface metrology to general high-precision automation.
- Description
- Specifications
- Dimensions
- Ordering Info
- Downloads
Design Features
- Integrated, low-profile, XY, ball-screw stage
- Long-life linear motion guide bearing system
- Optional low thermal expansion glass linear encoder
- Cost-effective, high-precision planar performance
Robust, High-Precision Design
The PlanarSL comes standard with a precision-ground and preloaded ball screw. Unlike competitive designs where the ball screw is positioned on the side or off-center, the PlanarSL is designed to drive directly through the centers of friction and stiffness resulting in superior geometric performance and accuracy.
High-precision linear motion guide bearings provide excellent straightness and flatness performance while supplying optimal support of the moving carriage over the entire XY travel. Using careful design and years of experience in precision motion systems, the PlanarSL structural elements have been optimized for the highest possible planar performance.
Optional Low Thermal-Expansion Linear Encoder
Unlike competitive designs using steel (13 ppm/˚C) or glass scales with 8 ppm/˚C thermal expansion coefficients, the PlanarSL is available with low-thermal expansion (3.3 ppm/˚C) precision glass scales on both axes allowing for high-accuracy and repeatable positioning over long periods of time. The linear encoder, available with amplified sine (1 Vpp) or 0.1 µm TTL digital outputs, is mounted near the centers of action, again providing an optimized stage solution for high-accuracy positioning.
Configuration Options
The PlanarSL is available standard with a 24 VDC bipolar stepper motor. Aerotech can also provide brushless and brush DC motors with high-resolution rotary encoders preconfigured for use with Aerotech controls.
Wide Variety of Control Options
A wide selection of state-of-the-art motion controllers is available to control the PlanarSL series. This suite of software and drive electronics provides various cost and performance levels to meet the needs of any application.
PlanarSL Specifications
| PlanarSL-100XY | |
|---|---|
| Travel | 100 mm x 100 mm |
| Accuracy-Ball Screw-HALAR(1) | ±1.5 µm |
| Accuracy-Ball Screw-Standard | ±4.0 µm |
| Accuracy-LT Encoder-HALAR(1) | ±1 µm |
| Accuracy-LT Encoder-Standard | ±3.0 µm |
| Bidirectional Repeatability Ball Screw | ±0.75 µm |
| Bidirectional Repeatability LT Encoder | ±0.3 µm |
| Resolution (Minimum Incremental Motion) | 0.1 µm |
| Straightness | ±2.0 µm |
| Flatness | ±2.0 µm |
| Pitch | 14 arc sec |
| Roll | 14 arc sec |
| Yaw | 8 arc sec |
| Orthogonality | 20 arc sec |
| Maximum Speed(2) | 30 mm/s |
| Load Capacity-Horizontal(3) | 20 kg |
| Stage Mass | 16.6 kg |
| Material | Black Anodized Aluminum |
| MTBF (Mean Time Between Failure) | 20,000 Hours |
- Available with Aerotech controllers.
- With -SM option. Consult Aerotech for other motor options.
- On-axis loading for orientation listed.
- Specifications are per axis measured 25 mm above the tabletop.
PlanarSL Electrical Specifications
| PlanarSL-100XY | |
|---|---|
| Drive System | 24 VDC Bipolar Stepper Motor Standard; Other Motors Available – Contact Aerotech |
| Feedback | Noncontact Linear Encoder (LT) Optional; Amplified Sine (-AS) and TTL (0.1 µm) Versions Available |
| Maximum Bus Voltage | 48 VDC(1) |
| Limit Switches | 5 V, Normally Closed |
- With Aerotech control system.
PlanarSL-Series XY Stage
| Option | Description |
|---|---|
| PlanarSL-100XY | Ball-screw-driven XY table, 100mm x 100 mm travel |
Motor Configuration
| Option | Description |
|---|---|
| -SM | 24 VDC bipolar stepper motor (standard) |
- Other motor options available. Contact Aerotech for more details.
Lower-Axis Linear Encoder (Optional)
| Option | Description |
|---|---|
| -L-TAS | Lower-axis glass-scale linear encoder; amplified sine output 1 Vpp (20 µm signal period) |
| L-LTX50 | Lower-axis glass-scale linear encoder; 0.1 µm line-driver output after quadrature |
Upper-Axis Linear Encoder (Optional)
| Option | Description |
|---|---|
| -U-LTAS | Upper-axis glass-scale linear encoder; amplified sine output 1 Vpp (20 µm signal period) |
| -U-LTX50 | Upper-axis glass-scale linear encoder; 0.1 µm line-driver output after quadrature |
Integration (Required)
| Option | Description |
|---|---|
| -TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
| -TAC | Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. |
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