PlanarDLA Open Frame, XY, Direct-Drive, Mechanical-Bearing Stage

Description

Design Features

  • Integrated, low-profile, XY, linear-motor stage with clear aperture
  • Excellent geometric performance (straightness to ±0.5 µm, flatness to ±1.25 µm)
  • Optimized for high-dynamic applications
  • Speeds to 2 m/s and accelerations to 2g
  • Integrated cable management
  • Large selection - nine models in travel and accuracy

Aerotech’s PlanarDLA-series stages offer a clear aperture, high dynamics, and exceptional geometric performance in a compact, low-profile package. These stages are essential for applications ranging from two-sided LED wafer processing where high-dynamics and micrometer-level straightness are required, to quasi-static optical metrology where high-accuracy and precise geometric performance are necessary. Regardless of the application, the PlanarDLA is designed to meet a variety of application needs with an array of configurable options.

Ultra-Precise Stage Design

The PlanarDLA XY design provides for unparalleled planar geometric performance in applications where straightness and flatness of motion are critical. High-precision roller bearings, precision-machined surfaces, and noncontact direct-drive linear motors driving through the axes’ center-of-stiffness result in a positioning stage with exceptional geometric tolerances (straightness to ±0.5 µm and flatness to ±1.25 µm).

The PlanarDLA structural elements are optimized for high dynamics and high stiffness for the most demanding dynamic applications. With this optimized design, the PlanarDLA achieves high servo bandwidths while at the same time maximizing the clear aperture available and keeping the overall height to a minimum. Capable of achieving 2 m/s velocities and 2 g accelerations, the PlanarDLA enables high-throughput, high-accuracy processing resulting in superior process yield, and a low total cost of ownership.

Noncontact Direct-Drive Technology

Only noncontact, direct-drive technology offers high speed and accurate positioning coupled with maintenance-free operation and long service life. At the heart of the PlanarDLA is Aerotech’s proprietary direct-drive technology. This drive technology allows for unmatched performance compared to other competitive screw-based and linear motor designs.

All PlanarDLA stages are available with one or two motors per axis allowing optimization of each individual axis for the specific application and process. With two motors, the resulting drive force acts through the centers of friction and stiffness resulting in superior geometric performance and accuracy, while one motor per axis provides for a more economical choice if high-throughput and the strictest positioning performance is not required.

Variety of Cable Management Options

The standard cable management system on the PlanarDLA is integrated into the stage and optimized for long life and performance. Several standard options are available for additional servo axes, air/vacuum lines for vacuum chucks, or other process pneumatics.

Extreme Positioning Performance

The PlanarDLA is available in three positioning performance options. Relying on decades of experience in system-level design including not only positioning mechanics, but also software and electronics, Aerotech has developed advanced technologies to push the envelope of precision. High-performance -PLUS and -ULTRA options are available to enable accuracies and straightness values down to ±500 nm and orthogonality down to 5 µrad.

Specifications

Mechanical Specifications

 PlanarDLA-150XYPlanarDLA-250XY
  - -PLUS(1,2) -ULTRA(1,2) - -PLUS(1,2) -ULTRA(1,2)
Travel 150 mm x 150 mm 250 mm x 250 mm
Accuracy(2) X1
Motor
±5.0 µm ±0.7 µm ±0.7 µm ±6.0 µm ±0.8 µm ±0.8 µm
X2
Motors
±4.0 µm ±0.4 µm ±0.4 µm ±5.0 µm ±0.5 µm ±0.5 µm
Bidirectional Repeatability X1
Motor
±0.5 µm ±0.5 µm
X2
Motors
±0.25 µm ±0.25 µm
Resolution (Minimum Incremental Motion)(3) 3.0 nm 3.0 nm
Straightness Upper Axis X1
Motor
±1.5 µm ±1.5 µm ±0.7 µm ±2.0 µm ±2.0 µm ±0.7 µm
X2
Motors
±1.0 µm ±1.0 µm ±0.5 µm ±1.5 µm ±1.5 µm ±0.5 µm
Lower Axis X1
Motor
±2.5 µm ±2.5 µm ±0.7 µm ±3.25 µm ±3.25 µm ±0.7 µm
X2
Motors
±2.0 µm ±2.0 µm ±0.5 µm ±2.75 µm ±2.75 µm ±0.5 µm
Flatness ±1.25 µm ±1.75 µm
Pitch 39 µrad (8 arc sec) 58 µrad (12 arc sec)
Roll 39 µrad (8 arc sec) 58 µrad (12 arc sec)
Yaw X1
Motor
39 µrad (8 arc sec) 49 µrad (10 arc sec)
X2
Motors
29 µrad (6 arc sec) 39 µrad (8 arc sec)
Orthogonality 97 µrad
(20 arc sec)
24 µrad
(5 arc sec)
5 µrad
(1 arc sec)
97 µrad
(20 arc sec)
24 µrad
(5 arc sec)
5 µrad
(1 arc sec)
Max Speed(4) 1.5 m/s 2.0 m/s
Max Acceleration
(No Load, Upper-Axis)(4)
1.0 g (X1 motor)
2.0 g (X2 motors)
1.0 g (X1 motor)
2.0 g (X2 motors)
Maximum Force - Continuous, 1.4 bar (20 psi) Air Cooling Upper Axis 47 N (X1 motor)
94 N (X2 motors)
120 N (X1 motor)
240 N (X2 motors)
Lower Axis 120 N (X1 motor)
240 N (X2 motors)
250 N (X1 motor)
500 N (X2 motors)
Load Capacity(5) Horizontal 20 kg 30 kg
Moving Mass Upper Axis 4.3 kg (UX1 motor)
4.5 kg (-UX2 motor)
6.9 kg (UX1 motor)
7.2 kg (-UX2 motor)
Lower Axis 18.1 kg (-LX1-UX1 motor)
20.0 kg (-LX1-UX2 motor)
18.5 kg (-LX2-UX1 motor)
20.6 kg (-LX2-UX2 motor)
33.7 kg (-LX1-UX1 motor)
38.1 kg (-LX1-UX2 motor)
34.6 kg (-LX2-UX1 motor)
39.0 kg (-LX2-UX2 motor)
Stage Mass(6) 30 kg-36 kg 60 kg-67 kg
Material Black Anodized Aluminum
MTBF (Mean Time Between Failure) 30,000 Hours
  1. The -PLUS and -ULTRA options require the use of an Aerotech controller.
  2. Specifications for -BASE and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.
  3. Specified for X2 motors. Contact factory for X1 motor arrangement.
  4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
  5. On-axis loading for orientation listed.
  6. Stage mass a function of motor configuration.
 PlanarDLA-330XY
  - -PLUS(1,2) -ULTRA(1,2)
Travel 330 mm x 330 mm
Accuracy(2) X1 Motor ±8 µm ±1 µm ±1 µm
X2 Motors ±6 µm ±0.7 µm ±0.7 µm
Bidirectional Repeatability X1 Motor ±0.5 µm
X2 Motors ±0.25 µm
Resolution (Minimum Incremental Motion)(3) 3 nm
Straightness Upper Axis X1 Motor ±2.5 µm ±2.5 µm ±0.8 µm
X2 Motors ±2.0 µm ±2.0 µm ±0.6 µm
Lower Axis X1 Motor ±4.0 µm ±4.0 µm ±0.8 µm
X2 Motors ±3.5 µm ±3.5 µm ±0.6 µm
Flatness ±2.5 µm
Pitch 68 µrad (14 arc sec)
Roll 68 µrad (14 arc sec)
Yaw X1 Motor 58 µrad (12 arc sec)
X2 Motors 49 µrad (10 arc sec)
Orthogonality 97 µrad
(20 arc sec)
24 µrad
(5 arc sec)
5 µrad
(1 arc sec)
Max Speed(4) 2.0 m/s
Max Acceleration (No Load, Upper-Axis)(4) 1.0 g (X1 motor)
2.0 g (X2 motors)
Maximum Force - Continuous, 1.4 bar (20 psi) Air Cooling Upper Axis 173 N (X1 motor)
346 N (X2 motors)
Lower Axis 302 N (X1 motor)
604 N (X2 motors)
Load Capacity(5) Horizontal 50 kg
Moving Mass Upper Axis 13.4 kg (UX1 motor)
14.0 kg (-UX2 motor)
Lower Axis 57.0 kg (-LX1-UX1 motor)
65.3 kg (-LX1-UX2 motor)
58.1 kg (-LX2-UX1 motor)
66.5 kg (-LX2-UX2 motor)
Stage Mass(6) 93 kg - 109 kg
Material Black Anodized Aluminum
MTBF (Mean Time Between Failure) 30,000 Hours
  1. The -PLUS and -ULTRA options require the use of an Aerotech controller.
  2. Specifications for -BASE and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.
  3. Specified for X2 motors. Contact factory for X1 motor arrangement.
  4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
  5. On-axis loading for orientation listed.
  6. Stage mass a function of motor configuration.

Electrical Specifications

 PlanarDLA
Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage 340 VDC
Limit Switches 5 V, Normally-Closed
Home Switch Near Center of XY Travel

Recommended Controller

 PlanarDLA
Multi-Axis A3200 Ndrive CP
Ndrive HLe/Ndrive HPe
Npaq
Ensemble Ensemble CP
Ensemble HLe/Ensemble HPe
  • PlanarDLA Plots
    Cantilever load performance plots

Dimensions

  • PlanarDLA-150XY
    PlanarDLA-150XY
  • PlanarDLA-250XY
    PlanarDLA-250XY
  • PlanarDLA-330XY
    PlanarDLA-330XY

Ordering Information

PlanarDLA Series XY Stage

OptionDescription
PlanarDLA-150XY Linear motor XY table w/clear aperture; 150 mm x 150 mm travel
PlanarDLA-250XY Linear motor XY table w/clear aperture; 250 mm x 250 mm travel
PlanarDLA-330XY Linear motor XY table w/clear aperture; 330 mm x 330 mm travel

Performance (Optional) – Requires Aerotech Controller

OptionDescription
-PLUS High-accuracy performance option
-ULTRA Ultra-high accuracy 2D performance option

Motor Configuration (Required)

OptionDescription
-LX1-UX1 1 motor on lower-axis, 1 motor on upper-axis
-LX1-UX2 1 motor on lower-axis, 2 motors on upper-axis
-LX2-UX1 2 motors on lower-axis, 1 motor on upper-axis
-LX2-UX2 2 motors on lower-axis, 2 motors on upper-axis

Lower-Axis Encoder (Required)

OptionDescription
-L-LTAS Lower-axis glass scale linear encoder; amplified sine output 1 Vpp (20 μm signal period)
-L-LTX50 Lower-axis glass scale linear encoder; 0.1 μm line driver output after quadrature

Upper-Axis Encoder (Required)

OptionDescription
-U-LTAS Upper-axis glass scale linear encoder; amplified sine output 1 Vpp (20 μm signal period)
-U-LTX50 Upper-axis glass scale linear encoder; 0.1 μm line driver output after quadrature

CMS (Required)

OptionDescription
-CMS0 No cable management for third axis on top of XY
-CMS1 Cable management for air/vacuum line for vacuum chuck or process pneumatics
-CMS2 Cable management for motor, feedback, and air/vacuum line for third axis on top of the XY