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Ordering Info



Path 7




Ordering Info



Design Features

  • Enhanced second-generation design
  • Achieves minimum incremental motion to 0.5 nm - NEW
  • Optimizes orthogonality, straightness & flatness with integrated XY design
  • Guarantees two-dimensional accuracy of ±250 nm or better with ULTRA calibration option
  • Features high-precision crossed-roller bearings for excellent dynamic performance & generous load capacity
  • Maximizes process throughput & reliability with ironless direct-drive linear motor
  • Available with high-resolution incremental or absolute encoders - NEW

Key Applications

ANT95XY is ideal for multi-axis applications that require high-precision and dynamic positioning performance, including:

  • Photonics assembly & inspection
  • Fiber alignment & optimization
  • Optics manufacturing, testing & inspection
  • Sensor testing & qualification
  • Semiconductor processing & inspection
  • Research & laboratory applications

Ultra-Precise Stage Design

ANT95XY’s integrated two-axis design allows you to optimize critical geometric elements such as orthogonality, straightness and flatness, resulting in a stage with exceptional motion characteristics. Our direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. Both travel options (25 mm x 25 mm and 50 mm x 50 mm) come with the 60 mm profile height. The integrated cable management system is designed for long life and minimal drag forces.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95XY stages utilize our advanced direct-drive technology to achieve the highest level of positioning performance. This direct-drive technology delivers ultra-smooth, consistent motion with outstanding dynamic characteristics to optimize your process throughput. The unique drive and bearing combination, packaged in an extremely compact form factor, offers tangible advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT95XY family has universal mounting and tabletop patterns that allow for easy system integration. ANT95XY stages are easily combined with other products -- including ANT95LZ, ANT95LZS, ANT95R, ANT95V, ANT20G and more -- to achieve complex, multiple degree-of-freedom motion and positioning solutions.

ULTRA Performance Grade Option

In order to achieve the highest possible system accuracy from our multi-axis nanopositioning systems, we’ve developed an advanced, dynamic trajectory calibration system. To take advantage of this sophisticated calibration system, the mechanical system is completely assembled, functionally tested and calibrated in our best-in-class metrology labs. Nanometer-level system accuracy can only be achieved under stringent environmental conditions that ensure calibration with the best test equipment, using the highest-precision mechanical elements and ULTRA software capabilities of our industry-leading controls. By implementing ULTRA dynamic trajectory calibration with the ANT95XY, we are able to produce guaranteed two-dimensional accuracies of ±250 nm or better.

The plots provided in the specifications illustrate performance differences between a standard ANT95XY and the ULTRA version. ULTRA calibration virtually eliminates straightness, orthogonality and accuracy errors resulting from yaw.




Ordering Information

Travel (Required)

Option Description
-02525 mm x 25 mm travel
-05050 mm x 50 mm travel

Feedback (Required)

Option Description
-E1Incremental linear encoders, 1 Vpp amplified sine output
-E2Incremental linear encoders, digital RS422 output, 5 nm electrical resolution
-E3Absolute + Incremental 1 Vpp linear dual-track encoder
-E4Incremental linear encoders, 1 Vpp amplified sine output, high-performance

Mounting Plate (Optional)

Option Description
-MPMounting plate

Performance Grade (Required)

Option Description
-PL1Base performance
-PL3High-accuracy performance, PLUS
-PL4 Ultra high-accuracy performance, ULTRA

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TASIntegration - Test as system

Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components

Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

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