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AGV-XPO High-Dynamic Laser Scan Heads

AGV-XPO, our premier two-axis laser scan head, helps to minimize the tradeoff between speed and precision. Its low-inertia, high-efficiency motors enable rapid acceleration profiles, while ultra-high resolution position feedback and optimized structural dynamics provide excellent part-profile tracking with minimal following error. Pair AGV-XPO with an Aerotech controller to enhance your process through advanced motion capabilities and
coordination with other axes of motion.

Have questions? Contact an Aerotech expert.
Request a Quote
Description

Design Features

  • Increases process throughput with innovative, dynamically optimized design
  • Provides superior dynamic accuracy & improves process yield with high-resolution feedback
  • Enhances thermal stability with optional air & water cooling
  • Offers system design flexibility with a multitude of optical configurations
  • Synchronizes easily with other motion axes, offering seamless integration & ease of use

Key Applications

AGV-XPO is ideal for high-throughput applications that require superior dynamic precision, minimal following error and rapid move-and-settle performance, including:

  • Display processing
  • High-speed drilling & cutting
  • Electronics manufacturing
  • Large-field & long focal length scanning
  • Femtosecond laser processing

Structurally Optimized for High Dynamics

Our AGV-XPO scan heads are engineered from the ground up to deliver exceptionally high speeds and accelerations while simultaneously providing outstanding part-path accuracy. Key to this capability is a novel motor design, featuring an ultra-stiff, low-inertia rotor paired with a high-efficiency stator, resulting in increased bandwidth and reduced tracking errors when compared to more traditional galvo motor designs. Plus, specially optimized mirrors and mirror mounts further help to improve dynamic performance by increasing the torsional stiffness and reducing the rotational inertia.

Superior Feedback Resolution

A high-resolution feedback device is paramount to achieving dynamic accuracy at high speeds. AGV-XPO is available in two feedback configurations to suit a diverse range of application requirements. For applications that demand the highest levels of acceleration and have short-to-medium effective focal lengths, a high-resolution position encoder with digitally interpolated output signals and a low-inertia scale (-E1 option) is preferred. For high-dynamic applications that require the finest part-path accuracy and/or utilize long effective focal lengths, an ultra high-resolution encoder with a feedback resolution finer than 0.0002 µrad (-E2 option) is available.

Configuration Flexibility

AGV-XPO is available with multiple aperture sizes and a broad selection of optical coatings and focusing optics to support a diverse range of lasers and applications. We can also supply customized optics and optical mounting features upon request. Additionally, AGV-XPO can be configured with air-cooled mirrors, water-cooled motors or both. These active cooling features help to preserve laser spot placement accuracy in the presence of thermal disturbances caused by the laser and by aggressive motion profiles. Finally, all Aerotech laser scan heads can be effortlessly coordinated with other types of motion axes (servo, stepper, piezo, hexapod, etc.) using an Aerotech controller, resulting in simplified system integration and optimal ease of use.

Advanced Programming Features

The AGV-XPO uses all the advanced motion and position synchronized output (PSO) capabilities that Aerotech has developed for traditional servo-based laser processing applications. Contouring functions can be used to help minimize trajectory overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed. Aerotech’s infinite field of view (IFOV) function seamlessly combines servo and scanner motion to extend the marking capability of the scanner across the entire travel of the servo stages, eliminating stitching errors that can occur in a more traditional step-and-scan process.

Specifications

AGV-XPO Specifications

AGV10XPOAGV14XPOAGV20XPO
OPTICAL PERFORMANCE
Beam Aperture10 mm14 mm20 mm
Maximum Scan Angle±20°
Beam Displacement 12.6 mm16.5 mm23.2 mm
Feedback Resolution0.012 µrad (25 bit) (-E1)
0.00016 µrad (32 bit) (-E2)
Dither (Min. Incremental Motion) (2)0.4 µrad RMS (-E1)
0.02 µrad RMS (-E2)
Accuracy50 µrad pk-pk
Repeatability (3)0.4 µrad RMS
Gain Error0.05 mrad
Non-Linearity0.005%
DYNAMIC PERFORMANCE
Tracking Error0 µsec
Peak Acceleration (4)(5)355,000 m/s2 (-E1)
300,000 m/s2 (-E2)
262,000 m/s2 (-E1)
231,000 m/s 2 (-E2)
95,000 m/s2 (-E1)
88,000 m/s 2 (-E2)
Continuous Acceleration (4)(6)95,000 m/s2 (-E1)
80,000 m/s 2 (-E2)
66,000 m/s2 (-E1)
58,000 m/s 2 (-E2)
25,000 m/s2 (-E1)
23,000 m/s 2 (-E2)
Positioning Speed (4)84 m/s (-E1)
32 m/s (-E2)
81 m/s (-E1)
32 m/s (-E2)
55 m/s (-E1)
32 m/s (-E2)
Jump & Settle Time, 1 mm Move (4)(7)210 µs (-E1)
250 µs (-E2)
225 µs (-E1)
260 µs (-E2)
280 µs (-E1)
340 µs (-E2)
STABILITY
Long-Term Drift-Offset (3)10 µrad/12 hrs
15 µrad/24 hrs
Long-Term Drift-Gain(3)10 ppm/24 hrs
Thermal Drift-Offset10 µrad/°C
Thermal Drift-Gain1 ppm/°C
MECHANICAL SPECIFICATIONS
Mass 2.5 kg (-E1)
3.1 kg (-E2)
2.6 kg (-E1)
3.2 kg (-E2)
2.9 kg (-E1)
3.5 kg (-E2)
MaterialAluminum (Black Anodize and Blue Paint)
MTBF (Mean Time Between Failure)20,000 Hours
Notes:
  1. All angles are optical unless otherwise specified.
  2. Without -AC air cooling option.
  3. After initial 3 hour warm-up, ambient temperature variation < ±0.5 °C.
  4. Typical performance with f = 160mm F-Theta objective.
  5. Based on maximum rated current of the motor.
  6. Based on rated rms current of the motor with -WC water cooling option; maximum continuous acceleration is 70% of this value without water cooling.
  7. Settled to within 1% of move distance.
  8. All specifications are per axis unless otherwise noted.

AGV-XPO Electrical Specifications

AGV10XPOAGV14XPOAGV20XPO
Drive SystemBrushless Direct-Drive Galvano Motor
FeedbackNoncontact Rotary Encoder
Maximum Bus Voltage±48 VDC
Limit SwitchesOptical Limit Switches and Software Limits
Home SwitchAt Center
Dimensions
AGV10XPO-E1-BE1
AGV10XPO-E1-BE2
AGV10XPO-E2-BE1
AGV10XPO-E2-BE2
AGV14XPO-E1-BE1
AGV14XPO-E1-BE2
AGV14XPO-E2-BE1
AGV14XPO-E2-BE2
AGV20XPO-E1-BE1
AGV20XPO-E1-BE2
AGV20XPO-E2-BE1
AGV20XPO-E2-BE2
Ordering Info
AGV-XPO Series High-Dynamic Laser Scan Head
OptionDescription
AGV10XPO2-axis galvanometer scanner with 10 mm diameter beam aperture
AGV14XPO2-axis galvanometer scanner with 14 mm diameter beam aperture
AGV20XPO2-axis galvanometer scanner with 20 mm diameter beam aperture
Notes:
  1. Contact factory for additional aperture options.
Feedback (required)
OptionDescription
-E1High-resolution encoder feedback
-E2Ultra High-resolution encoder feedback
Beam Entry (required)
OptionDescription
-BE1Right-side laser beam entry (standard)
-BE2Left-side laser beam entry
Wavelength of Mirror Coating (required)
OptionDescription
-W00110.6 µm
-W002Durable Silver (450 nm - 10.6 µm)
-W0031552 nm
-W0041064 nm
-W0051030 nm
-W006532nm
-W007515nm
-W008355nm
-W009343 nm
-W0129.3nm
Notes:
  1. Custom coatings available. Contact factory for details.
F-Theta Lens (optional)
OptionDescription
-LXXA variety of F-theta lenses with different focal length and wavelength combinations are
available; inquire with factory
Air Cooling (optional)
OptionDescription
-ACAir Cooling
Water Cooling (optional)
optiondescription
-WCWater Cooling
Integration (required)
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
OptionDescription
-TASIntegration - Test as system


Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.

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