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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

  • 0.01 arc sec resolution
  • 0.005 arc sec in-position stability
  • Outstanding error motion specifications
  • Multi-axis configurations
  • High dynamic performance
  • Both limited and unlimited rotation

Multi-Axis Capabilities

The ANT95R series is designed for compatibility and easy integration with Aerotech's ANT linear stage product offerings. Together these stages provide accuracy, stability and small size performance capability for almost any nanomanufacturing or inspection application.

Dynamic Performance

In addition to the high precision levels, these systems offer high dynamic performance and throughput ideal for processes that require speed and precision.

Durability

The ANT95R stage series was designed to operate in a 24/7 manufacturing environment. Unlike other rotary devices, the ANT95-R requires no periodic maintenance, assuring years of trouble-free operation.

Dimensions

ANT95R



Ordering Information

Travel (Required)

Option Description
-360Continuous travel
-20Limited travel, ±10 degrees
-180Limited travel, ±90 degrees

Mounting Plate (Optional)

Option Description
-MP Mounting plate

Performance Grade (Required)

Option Description
-PL1Base performance
-PL2High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

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