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Ordering Info



Path 7




Ordering Info



Design Features

  • Enhanced second-generation design
  • Achieves minimum incremental motion to 0.5 nm - NEW
  • Delivers nanometer-level positioning performance over travel lengths up to 100 mm
  • Features high-precision crossed-roller bearings for excellent dynamic performance & generous load capacity
  • Optimizes process throughput & maximizes reliability with ironless direct-drive linear motor
  • Integrates easily into multi-axis assemblies & motion subsystems
  • Available with high-resolution incremental or absolute encoders - NEW

Key Applications

ANT95L stages are ideal for high-precision and high-dynamic positioning applications, including:

  • Photonics assembly & inspection
  • Fiber alignment & optimization
  • Optics manufacturing, testing & inspection
  • Sensor testing & qualification
  • Semiconductor processing & inspection
  • Research & laboratory applications

Industry-Leading Motion Performance

Outstanding accuracy, position repeatability and in-position stability require extremely fine system resolution. Now available with an improved high-performance encoder option, ANT95L can easily achieve minimum incremental steps of 0.5 nm. Our direct-drive technology exhibits no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95L stages use our advanced direct-drive technology to achieve the highest level of positioning performance. This direct-drive technology delivers ultra-smooth, consistent motion with outstanding dynamic characteristics to optimize your process throughput. The unique drive and bearing combination, packaged in an extremely compact form factor, offers tangible advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT95L family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations. Also available in an integrated XY arrangement, ANT95L stages are easily combined with other products — including ANT95LZ, ANT95LZS, ANT95R, ANT95V, ANT20G and more — to achieve complex, multiple degree-of-freedom motion and positioning solutions.





Ordering Information

Travel (Required)

Option Description
-02525 mm travel
-05050 mm travel
-100100 mm travel
Note:Other travel options are available upon request. Contact Aerotech for more information.

Feedback (Required)

Option Description
-E1Incremental linear encoder, 1 Vpp amplified sine output
-E2Incremental linear encoder, digital RS422 output, 5 nm electrical resolution
-E3Absolute + Incremental 1 Vpp linear dual-track encoder
-E4Incremental linear encoder, 1 Vpp amplified sine output, high-performance

Mounting Plate (Optional)

Option Description
-MPMounting plate

Performance Grade (Required)

Option Description
-PL1Base performance
-PL2High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TASIntegration - Test as system

Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components

Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

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