AVS100 Series Mechanical-Bearing Screw-Driven Lift Stage
Aerotech’s AVS100 series stages offer a solution for applications that require very small incremental movements in elevation above a horizontal plane. Low profiles and precise motion capability make these stages ideal for use in semiconductor wafer inspection and testing, fiberoptics assembly and inspection, automated tool alignment, machine vision inspection systems and laser machining applications.
- Description
- Specifications
- Dimensions
- Ordering Info
- Downloads
Design Features
- Long-life linear guide bearing system
- Submicron closed-loop positioning
- Low-cost, high-performance stage
- 6, 13 and 25 mm travel models
- Precision-ground ball screw
Quality Design Provides Superior Performance
The AVS100 series provides precise elevation of a load in a vertical plane. Rotational movement of a precision-ground ballscrew is converted into vertical elevation of the AVS100 series tabletop.
Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability, long life, and smooth, precision motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is ensured.
Careful mechanical design allows the AVS100 series to achieve submicron resolution and still maintain a compact profile. The optional factory calibration option is available to further increase standard accuracy and repeatability.
A Better Approach to Vertical Motion
The vertical lift approach offers an alternative to traditional Z-plane oriented stages. Not only do the AVS100 series stages offer a lower profile, but the load can also be accessed easily from any side. And by centering the payload over the bearings, there are no cantilevering effects. The AVS100 series stages provide a space-saving alternative to traditional XYZ systems and are equally suited to laboratory and industrial applications. Optional stage finishes are available for various environments, including vacuum preparation.
Additional Standard Features
All AVS100 series stages are equipped standard with integral limit switches and mechanical hard stops. The stage tabletop is treated with a Teflon®-impregnated hardcoat (Rockwell 62 hardness) that is scratch-resistant and provides outstanding protection in the harshest environments. The stage itself has a black anodize finish.
AVS100 Specifications
| AVS100-06 | AVS100-13 | AVS100-25 | |
|---|---|---|---|
| Travel | 6 mm | 13 mm | 25 mm |
| Drive System | Precision Ball Screw/Brushless Servomotor | ||
| Bus Voltage | Up to 160 VDC | ||
| Continuous Current-Apk | 2.3 A | ||
| Continuous Current-Arms | 1.6 A | ||
| Resolution-with 1000-line TTL encoder | 0.53 µm @ 4000 steps/rev motor resolution | ||
| Resolution-with 1000-line 1 Vpp encoder | 5.3 nm - 0.106 µm | ||
| Resolution-with 2500-line TTL encoder | 0.2 µm @ 10,000 steps/rev motor resolution | ||
| Maximum Travel Speed | 50 mm/s | ||
| Effective Lead | 2.12 mm/rev | ||
| Maximum Load(1) | 25.0 kg | ||
| Accuracy-Uncalibrated | ±1.5 µm | ±3.0 µm | ±5.0 µm |
| Accuracy-Calibrated(2) | ±1.0 µm | ||
| Bidirectional Repeatability-Uncalibrated | ±1.0 µm | ||
| Bidirectional Repeatability-Calibrated(2) | ±0.75 µm | ||
| Straightness and Flatness (Maximum Deviation) | ±1.5 µm | ±3.0 µm | ±5.0 µm |
| Pitch and Roll | ±5 arc sec | ±7.5 arc sec | ±10 arc sec |
| Nominal Stage Weight (With Motor) | 4.1 kg | 6.1 kg | 10.5 kg |
| Construction | Aluminum/Black Anodize/Hardcoat Table | ||
- Higher load possible with larger motor on the AVS series stage.
- Requires Aerotech controller.
- Specifications are for single-axis systems measured 50 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- For inverted operation, consult factory.
AVS100 Mechanical-Bearing Screw-Driven Lift Stage
Travel (Required)
| Option | Description |
|---|---|
| -06 | 6 mm Travel |
| -13 | 13 mm Travel |
| -25 | 25 mm Travel |
Motor (Optional)
| Option | Description |
|---|---|
| -M1 | BMS60 Servo Motor with 2500-Line TTL Encoder |
| -M2 | BMS60 Servo Motor with 2500-Line TTL Encoder and Holding Brake |
| -M3 | BMS60 Servo Motor with 1000-Line 1 Vpp Encoder |
| -M4 | BMS60 Servo Motor with 1000-Line 1 Vpp Encoder and Holding Brake |
| -M5 | BM75 Servo Motor with 2500-Line TTL Encoder |
| -M6 | BM75 Servo Motor with 2500-Line TTL Encoder and Holding Brake |
| -M7 | BM75 Servo Motor with 1000-Line 1 Vpp Encoder |
| -M8 | BM75 Servo Motor with 1000-Line 1 Vpp Encoder and Holding Brake |
| -M9 | SM60 High-Voltage Stepper Motor |
Foldback (Optional)
| Option | Description |
|---|---|
| -FB1 | Motor Foldback Kit for .250 Inch Diameter Shaft |
| -FB2 | Motor Foldback Kit with Brake for .250 Inch Diameter Shaft |
Motor Orientation (Optional)
| option | description |
|---|---|
| -2 | Bottom Cable Exit |
| -3 | Left-Side Cable Exit (Standard) |
| -4 | Top Cable Exit |
| -5 | Right-Side Cable Exit |
| -8 | Right-Side Foldback |
| -12 | Left-Side Foldback |
Limits (Required)
| Option | Description |
|---|---|
| -LI1 | Normally-Closed Limit Switches, 9-Pin D Connector |
| -LI2 | Normally-Closed Limit Switches, Flying Leads |
| -LI3 | Normally-Open Limit Switches, 9-Pin D Connector |
| -LI4 | Normally-Open Limit Switches, Flying Leads |
Coupling (Optional)
| Option | Description |
|---|---|
| -CP1 | Coupling for 0.250 Inch Diameter Shaft |
| -CP2 | Coupling for 0.375 Inch Diameter Shaft |
Metrology (Required)
| Option | Description |
|---|---|
| -PL1 | Metrology, Uncalibrated with Performance Plots |
| -PL2 | Metrology, Calibrated (HALAR) with Performance Plots |
Integration (Required)
| Option | Description |
|---|---|
| -TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
| -TAC | Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system. |
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