AVS1000 Mechanical-Bearing Ball-Screw Lift Stage
Our AVS1000 series stages offer the ideal solution for applications that require moving large or heavy loads over very small incremental movements in elevation above a horizontal plane. Low profiles and precise motion capability make these stages ideal for use in semiconductor manufacturing and inspection, automated tool alignment, machine vision inspection systems and laser machining applications.
- Description
- Specifications
- Dimensions
- Ordering Info
- Downloads
Design Features
- High-load lift stage with aperture
- Submicron closed-loop positioning
- Excellent pitch and yaw characteristics over full travel
- 5 mm or 10 mm travel; custom designs for alternate travels available
- Optional cleanroom and ESD protection
- Precision-ground ball screw for high performance
Quality Design Provides Superior Performance
The AVS1000 series provides precise elevation of a load in a vertical plane using a moving wedge design. The precision machined wedge block converts horizontal movement from a precision-ground ball screw to vertical elevation of the AVS1000 series tabletop.
Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability, long life and smooth, precision motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is ensured.
Careful design of the wedge angle and bearing system allows the AVS1000 series to achieve submicron resolution and still maintain a compact profile. The optional factory calibration option is available to further increase standard accuracy and repeatability.
A Better Approach to Vertical Motion
The vertical lift approach offers an alternative to traditional Z-plane oriented stages. Not only do the AVS1000 series stages offer a lower profile, but the load can also be accessed easily from any side. And by centering the payload over the bearings, there are no cantilevering effects.
Motor and Drives
The AVS1000 series includes Aerotech’s high performance NEMA 34 frame-size BMS series brushless, slotless servomotor. The slotless motor has zero cogging and therefore is optimized for applications requiring very smooth motion.
Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.
AVS1000 Specifications
| AVS1000-05 | AVS1000-10 | |
|---|---|---|
| Travel | 5 mm | 10 mm |
| Accuracy-Standard(1) | ±2.0 µm | ±4.0 µm |
| Accuracy-Calibrated(1) | ±1.0 µm | |
| Resolution | 5 nm | |
| Bidirectional Repeatability(1) | ±0.5 µm | |
| Straightness(2) | ±0.5 µm | ±1.0 µm |
| Pitch(2) | ±5 arc sec | ±7.5 arc sec |
| Roll(2) | ±5 arc sec | ±7.5 arc sec |
| Yaw(2) | ±5 arc sec | ±7.5 arc sec |
| Maximum Speed | 20 mm/s | |
| Maximum Acceleration | 0.05 g | |
| Load Capacity-Vertical(3) | 135 kg | |
| Material | Aluminum | |
| MTBF (Mean Time Between Failure) | 15,000 Hours | |
- Certified with each stage.
- Specifications are for no-load condition. Pitch, roll and straightness may be affected by amount and centering of the load.
- Load must be centered within the stage aperture.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
AVS1000 Electrical Specifications
| AVS1000-05 | AVS1000-10 | |
|---|---|---|
| Drive System | Brushless Rotary Servomotor | |
| Feedback | Noncontact Linear Encoder | |
| Maximum Bus Voltage | up to 320 VDC | |
| Limit Switches | 5 V, Normally Closed | |
AVS100 Mechanical-Bearing Ball-Screw Lift Stage
Travel (Required)
| Option | Description |
|---|---|
| -05 | 5 mm travel |
- Custom travels available; consult Aerotech for more information.
Motor (Option)
| Option | Description |
|---|---|
| -M1 | BMS280 brushless servomotor and 1000-line TTL encoder |
| -M2 | BMS280 brushless servomotor and 1000-line TTL encoder with brake |
| -M3 | BMS280 brushless servomotor and 1000-line 1 Vpp encoder |
| -M4 | BMS280 brushless servomotor and 1000-line 1 Vpp encoder with brake |
Limits (Required)
| Option | Description |
|---|---|
| -LI1 | Normally-closed limit switches, 9-pin D connector |
| -LI2 | Normally-closed limited switches, fly leads |
| -LI3 | Normally-open limit switches, 9-pin D connector |
| -LI4 | Normally-open limit switches, flying leads |
Integration (required)
| Option | Description |
|---|---|
| -TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
| -TAC | Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. |
Metrology (Required)
| Option | Description |
|---|---|
| -PL1 | Metrology, uncalibrated with performance plots |
| -PL2 | Metrology calibrated (HALAR) with performance plots |
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