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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

  • Superior payload capacity in a compact form-factor provides maximum utility
  • Ironless, cogless linear motor delivers smooth, ultra-precise motion
  • Excellent positioning & dynamic capabilities in a cost-effective package
  • Best-in-class geometric performance ensures superior workpoint accuracy
  • Rugged, reliable construction is ideal for versatile industrial use
  • Hardcover & side seals offer protection against contamination & particulates
  • ThermoComp® option automatically compensates for thermal disturbances
  • Vacuum- & cleanroom-compatible versions available

Key Applications

PRO165LM mechanical bearing, direct-drive linear stages are extremely versatile, trusted and proven in medium- and high-performance applications, such as:

  • Laser material processing
  • Precision metrology, inspection & microscopy
  • Electronics & circuit board manufacturing & inspection
  • Display processing
  • Synchrotron & light source experiments
  • Medical device manufacturing
  • Semiconductor fabrication
  • Fiber optics & silicon photonics processing
  • Additive manufacturing & precision assembly

Rugged & Reliable Mechanical Construction

A long-life recirculating linear guide bearing system, non-cogging linear motor and low-friction sealing solution make the PRO165LM an attractive choice for industrial applications such as laser machining, precision metrology, and electronics manufacturing and inspection. The PRO165LM’s durable construction provides protection from debris while the side seals prevent particulates from entering the stage. The curved hardcover design provides a natural shape that prevents excessive contamination from collecting on the stage. Capable of accommodating an ample payload range, PRO165LM stages are easy and intuitive to integrate, set up and operate. They also deliver an extraordinarily long lifetime of consistent positioning performance.

Direct-Drive Linear Motor

PRO165LM is powered by a high-performance linear motor. The ironless design outputs exceptional levels of force with absolutely zero cogging or torque ripple, resulting in extremely smooth position and velocity control. Completely free from backlash and mechanical wind-up, PRO165LM is highly capable of achieving excellent dynamic responsiveness and is ideal for applications requiring aggressive contouring accuracy and smooth velocity profiles.

High-Precision Motion Performance

PRO165LM linear stages are engineered with high-resolution linear encoders that provide minimum incremental motion down to 5 nm and even smaller in-position stability. With precision-ground bearings and an ultra-smooth, cog-free linear motor, plus the superior craftsmanship for which Aerotech products are known, PRO165LM direct-drive linear stages readily achieve sub-micrometer positioning repeatability and industry-leading accuracy—guaranteed.

Mitigate Thermal Effects with ThermoComp® 

Temperature changes and thermal effects are among the largest and most challenging sources of error in precision machines. Our ThermoComp® feature minimizes thermally-induced positioning errors, so you can focus entirely on your mission. This embedded temperature compensation unit helps to protect your process from temperature swings and heating effects, even in the most extreme industrial environments.

Design & Integration Flexibility

The PRO165LM’s many standard features and options make it incredibly flexible, so you can easily tailor it to your application. The base mounting holes are accessible from the outside of the stage, allowing for easy mounting to both metric and English optical tables and other interfaces. The stage tabletop comes standard with a metric mounting pattern to accommodate your payload, process equipment or even another axis of motion.  Multi-axis assemblies are now easier than ever to build and integrate, thanks to a variety of configurable cable management options. Plus, PRO165LM stages can be prepared for use in special environments by request. Contact us to learn more about compatibility in vacuum chambers, cleanrooms and more.

Automate with Professional-Grade Motion

Our PRO-series stages are available in many sizes and configurations to accommodate an equally diverse range of user needs and application requirements. In addition to the PRO-LM series of direct-drive linear stages, our PRO-SL screw-driven linear stages feature precision-ground ball screws for robust performance in any orientation. PRO stages are offered in six widths ranging from 115 mm to 560 mm (depending on your application’s space constraints and payload requirements) plus travel lengths ranging from 50 mm to 1000 mm or longer. Also available in a vertical elevator-stage variant, our PRO-SV long-travel lift stages offer heavy-duty lifting capacity and can be easily mounted to PRO-LM and PRO-SL linear stages.  

Aerotech PRO-series stages make it easier to build and integrate multi-axis assemblies and motion systems—whether you prefer to do it yourself or leave it to our motion and automation professionals.

Dimensions

PRO165LM



Cable Management (-CMS0)



Ordering Information

Travel (Required)

Option Description
-0100 100 mm travel stage
-0150 150 mm travel stage
-0200 200 mm travel stage
-0300 300 mm travel stage
-0400 400 mm travel stage
-0500 500 mm travel stage
-0600 600 mm travel stage
Note:
  1. Other travel options are available upon request. Contact Aerotech for more information.

Tabletop (Required)

Option Description
-TT1 Tabletop with metric dimension mounting
Note:
  1. Other tabletop options are available upon request. Contact Aerotech for more information.

Feedback (Required)

Option Description
-E1 Incremental encoder, 1 Vpp
-E2 Incremental linear encoder, 0.1 µm digital TTL output
Note:
  1. Other feedback options are available upon request. Contact Aerotech for more information.

Cable Management (Required)

Option Description
-CMS0 No external CMS, motor/feedback connector bracket on carriage
-CMS1 External CMS for single axis
-CMS2 External CMS for lower-axis PRO (XY) assembly
-CMS3 External CMS for lower-axis of two-axis (XZ or XT) assembly
-CMS4 External CMS for upper-axis of two-axis PRO (XY) assembly
-CMS5 External CMS for upper-axis of two-axis (YZ or XY) assembly
-CMS6 External CMS for lower-axis of three-axis (XYZ or XYT) assembly
-CMS7 External CMS for lower-axis of three-axis (XZT) assembly

Lifting Hardware (Optional)

Option Description
-LF Lifting hardware
Note:
  1. Lifting option only available on travels 400 mm and greater. Lifting should never be ordered on the upper-axis of an XY set (only order on lower-axis).

ThermoComp (Optional)

Option Description
-TCMP TheroComp integrated thermal compensation, single or lower axis

Metrology (Required)

Option Description
-PL0 No metrology performance plots
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as a separate line item)

Option Description
ALIGN-NPA Non-precision XY assembly
ALIGN-NPAZ Non-precision XZ or YZ assembly
ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages
ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages.
ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages.
ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5 microns orthogonality for short travel stages.

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