PRO560LM Mechanical Bearing, Direct-Drive Linear Stage
The PRO560LM is a wide-body industrial stage with an exceptional payload-carrying capacity. Compared to PRO280LM, PRO560LM offers improved angular and geometric performance thanks to its wider bearing separation, making it an excellent base axis for a multi-axis stage assembly. Combining superior craftsmanship and the highest quality components, PRO560LM stages consistently and reliably deliver best-in-class positioning performance. Thoughtfully engineered features and options, coupled with competitive pricing, make PRO560LM stages the ideal choice for streamlined integration into a wide variety of precision systems, machines and processes.
- Description
- Specifications
- Dimensions
- Ordering Info
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Design Features
- Ultra heavy-duty load capacity with premium geometric performance
- Ironless, cogless linear motor delivers smooth, ultra-precise motion
- Excellent positioning & dynamic capabilities in a cost-effective package
- Best-in-class geometric performance ensures superior workpoint accuracy
- Rugged, reliable construction is ideal for versatile industrial use
- Hardcover & side seals offer protection against contamination & particulates
- ThermoComp® option automatically compensates for thermal disturbances
- Vacuum- & cleanroom-compatible versions available
Key Applications
PRO560LM mechanical bearing, direct-drive linear stages are extremely versatile, trusted and proven in medium- and high-performance applications, such as:
- Laser material processing
- Precision metrology, inspection & microscopy
- Electronics & circuit board manufacturing & inspection
- Display processing
- Synchrotron & light source experiments
- Medical device manufacturing
- Semiconductor fabrication
- Fiber optics & silicon photonics processing
- Additive manufacturing & precision assembly
Rugged & Reliable Mechanical Construction
A long-life recirculating linear guide bearing system, non-cogging linear motor and low-friction sealing solution make the PRO560LM an attractive choice for industrial applications such as laser machining, precision metrology, and electronics manufacturing and inspection. The PRO560LM’s durable construction provides protection from debris while the side seals prevent particulates from entering the stage. The curved hardcover design provides a natural shape that prevents excessive contamination from collecting on the stage. Capable of accommodating an ample payload range, PRO560LM stages are easy and intuitive to integrate, set up and operate. They also deliver an extraordinarily long lifetime of consistent positioning performance.
Direct-Drive Linear Motor
PRO560LM is powered by a high-performance linear motor. The ironless design outputs exceptional levels of force with absolutely zero cogging or torque ripple, resulting in extremely smooth position and velocity control. Completely free from backlash and mechanical wind-up, PRO560LM is highly capable of achieving excellent dynamic responsiveness and is ideal for applications requiring aggressive contouring accuracy and smooth velocity profiles.
High-Precision Motion Performance
PRO560LM linear stages are engineered with high-resolution linear encoders that provide minimum incremental motion down to 5 nm and even smaller in-position stability. With precision-ground bearings and an ultra-smooth, cog-free linear motor, plus the superior craftsmanship for which Aerotech products are known, PRO560LM direct-drive linear stages readily achieve sub-micrometer positioning repeatability and industry-leading accuracy—guaranteed.
Mitigate Thermal Effects with ThermoComp®
Temperature changes and thermal effects are among the largest and most challenging sources of error in precision machines. Our ThermoComp® feature minimizes thermally-induced positioning errors, so you can focus entirely on your mission. This embedded temperature compensation unit helps to protect your process from temperature swings and heating effects, even in the most extreme industrial environments.
Design & Integration Flexibility
The PRO560LM’s many standard features and options make it incredibly flexible, so you can easily tailor it to your application. The base mounting holes are accessible from the outside of the stage, allowing for easy mounting to both metric and English optical tables and other interfaces. The stage tabletop comes standard with a metric mounting pattern to accommodate your payload, process equipment or even another axis of motion. Multi-axis assemblies are now easier than ever to build and integrate, thanks to a variety of configurable cable management options. Plus, PRO560LM stages can be prepared for use in special environments by request. Contact us to learn more about compatibility in vacuum chambers, cleanrooms and more.
Automate with Professional-Grade Motion
Our PRO-series stages are available in many sizes and configurations to accommodate an equally diverse range of user needs and application requirements. In addition to the PRO-LM series of direct-drive linear stages, our PRO-SL screw-driven linear stages feature precision-ground ball screws for robust performance in any orientation. PRO stages are offered in six widths ranging from 115 mm to 560 mm (depending on your application’s space constraints and payload requirements) plus travel lengths ranging from 50 mm to 1000 mm or longer. Also available in a vertical elevator-stage variant, our PRO-SV long-travel lift stages offer heavy-duty lifting capacity and can be easily mounted to PRO-LM and PRO-SL linear stages.
Aerotech PRO-series stages make it easier to build and integrate multi-axis assemblies and motion systems—whether you prefer to do it yourself or leave it to our motion and automation professionals.
PRO560LM Specifications
| PRO560LM-0300 | PRO560LM-0400 | PRO560LM-0500 | PRO560LM-0600 | PRO560LM-0800 | PRO560LM-1000 | |
|---|---|---|---|---|---|---|
| Travel | 300 | 400 | 500 | 600 | 800 | 1000 |
| Accuracy-Standard(1) | ±10 µm | ±12 µm | ±14 µm | ±15.5 µm | ±17 µm | ±18 µm |
| Accuracy-Calibrated(1) | ±1 µm | ±1.5 µm | ||||
| Resolution (Minimum Incremental Motion) | 5 nm (-E1 Encoder) | |||||
| Bidirectional Repeatability(1) | ±0.4 µm | ±0.5 µm | ||||
| Horizontal Straightness(1) | ±3 µm | ±4 µm | ±5 µm | ±6 µm | ±7 µm | ±8 µm |
| Vertical Straightness(1) | ±3 µm | ±4 µm | ±5 µm | ±6 µm | ±7 µm | ±8 µm |
| Pitch | 49 µrad | 60 µrad | 70 µrad | 78 µrad | 90 µrad | 110 µrad |
| Roll | 39 µrad | 44 µrad | 53 µrad | 58 µrad | 73 µrad | 87 µrad |
| Yaw | 49 µrad | 60 µrad | 70 µrad | 78 µrad | 90 µrad | 110 µrad |
| Maximum Speed(2) | 2 m/s | |||||
| Maximum Acceleration(2) | 3 g | |||||
| Maximum Force, Continuous | 532.4 N – Standard 792.6 N – With Air Cooling (20 psig) | |||||
| Load Capacity-Horizontal(3) | 150 kg | |||||
| Load Capacity-Side(3) | 150 kg | |||||
| Moving Mass | 25.0 kg | |||||
| Stage Mass | 90.4 kg | 99.5 kg | 108.6 kg | 117.7 kg | 135.9 kg | 154.1 kg |
| Material | Anodized Aluminum | |||||
| MTBF (Mean Time Between Failure) | 20,000 Hours | |||||
- Certified with -PL1/-PL2 option.
- Requires the selection of an appropriate amplifier with sufficient voltage and current.
- Axis-orientation for on-axis loading is listed.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Contact factory for multi-axis applications.
PRO560LM Electrical Specifications
| PRO560LM-0300 | PRO560LM-0400 | PRO560LM-0500 | PRO560LM-0600 | PRO560LM-0800 | PRO560LM-1000 | |
|---|---|---|---|---|---|---|
| Drive System | Brushless Linear Servomotor | |||||
| Feedback | Non-contact Linear Encoder -E1: 1 Vpp, 20 µm signal period -E2: Digital RS422, 0.1 µm electrical resolution | |||||
| Maximum Bus Voltage | 340 VDC | |||||
| Limit Switches | 5 V, Normally Closed | |||||
| Home Switch | Near Center | |||||
PRO560LM Series Linear Motor Stage
Travel (Required)
| Option | Description |
|---|---|
| -0300 | 300 mm travel stage |
| -0400 | 400 mm travel stage |
| -0500 | 500 mm travel stage |
| -0600 | 600 mm travel stage |
| -0800 | 800 mm travel stage |
| -1000 | 1000 mm travel stage |
- Other travel options are available upon request. Contact Aerotech for more information.
Tabletop (required)
| Option | Description |
|---|---|
| -TT1 | Tabletop with metric dimension mounting |
- TT1 option required for lower axis of XY. Other tabletop options are available upon request. Contact Aerotech for more information.
Feedback (Required)
| Option | Description |
|---|---|
| -E1 | Incremental encoder, 1 Vpp |
| -E2 | Incremental linear encoder, 0.1 μm digital TTL output |
- Other feedback options are available upon request. Contact Aerotech for more information.
Cable Management (Required)
| Option | Description |
|---|---|
| -CMS0 | No external CMS, motor/feedback connector bracket on carriage |
| -CMS1 | External CMS for single axis |
| -CMS2 | External CMS for lower-axis of two-axis PRO (XY) assembly |
| -CMS3 | External CMS for lower-axis of two-axis (XZ or XT) assembly |
| -CMS6 | External CMS for lower-axis of three-axis (XYZ or XYT) assembly |
| -CMS7 | External CMS for lower-axis of three-axis (XZT) assembly |
| -CMS9 | External CMS for lower-axis of four-axis (XYZT) assembly |
Lifting Hardware (Optional)
| Option | Description |
|---|---|
| -LF | Lifting hardware |
- Lifting option available on all travels.
ThermoComp (Optional)
| Option | Description |
|---|---|
| -TCMP | Description |
Metrology (Required)
| Option | Description |
|---|---|
| -PL0 | No metrology performance plots |
| -PL1 | Metrology, uncalibrated with performance plots |
| -PL2 | Metrology, calibrated (HALAR) with performance plots |
Integration (Required)
| Option | Description |
|---|---|
| -TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
| -TAC | Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. |
Accessories (to be ordered as a separate line item)
| Option | Description |
|---|---|
| ALIGN-NPA | Non-precision XY assembly |
| ALIGN-NPAZ | Non-precision XZ or YZ assembly |
| ALIGN-PA10 | XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages |
| ALIGN-PA10Z | XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages. |
| ALIGN-PA5 | XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages. |
| ALIGN-PA5Z | XZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5 microns orthogonality for short travel stages. |
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