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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

  • Nanometer performance in a large travel format (35 and 60 mm)
  • High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm)
  • In-position stability of <2 nm
  • Anti-creep crossed-roller bearings
  • High dynamic performance

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT130LZ stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance for high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.

The ANT130LZ stages use a nearly frictionless counterbalance mechanism to maintain performance levels while minimizing motor heating. The counterbalance is user adjustable from 0 to 10 kg.

Flexible System Design

The ANT130LZ family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations.

System Characteristics

Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT130LZ stage’s industry-leading 2 nm minimum incremental step size provides this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Dimensions

ANT130LZ



Ordering Information

ANT130LZ Single-Axis Z Direct Drive Nanopositioning Stage

Travel (Required)

Option Description
-035 35 mm travel
-060 60 mm travel

Connectors (Required)

Option Description
-CN1 Single 25-pin D connector, 25DU
-CN2 Two-connector, 4-pin HPD and 25-pin D, 4DU-25DU
Note:
  1. -CN1 option not valid for systems using bus voltages greater than 80 V

Performance Grade (Required)

Option Description
-PL1 Base performance
-PL2 High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
 
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
 
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system

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