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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

  • Nanometer performance in a large travel format (35 mm to 160 mm)
  • Dual-counterbalance, low-profile design
  • High-dynamic, noncontact direct-drive
  • Anti-creep crossed-roller bearings
  • Flexible tabletop and mounting patterns
  • High-resolution (2 nm), repeatability (75 nm), and accuracy (275 nm)
  • In-position stability of <2 nm

The ANT130LZS stages use a nearly frictionless dual-counterbalance mechanism to maintain performance levels while minimizing motor heating. The counterbalance is user adjustable from 0 to 14 kg. The dual-counterbalance design minimizes overall stage height and prevents off-axis moments that are applied by the counterbalance design that adversely affect straightness and angular errors. The result is positioning and geometric performance nearly equivalent to a non-counterbalanced ANT stage.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate, and high-speed positioning necessary for mass production of precision devices. ANT130LZS stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of performance for high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT130LZS family has universal mounting and tabletop patterns that allow for easy system integration. Two, three, or more axes can be easily combined for flexible system designs and multi-axis configurations.

System Characteristics

Outstanding accuracy, position repeatability, and in-position stability require small minimum incremental motion (mechanical resolution). The ANT130LZS stage’s industry-leading 2 nm minimum incremental step size enables this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Dimensions

ANT130LZS



Ordering Information

ANT130LZS Single-Axis Z Low-Profile Direct-Drive Nanopositioning Stage

Travel (Required)

Option Description
-035 35 mm travel
-060 60 mm travel
-110 110 mm travel
-160 160 mm travel

Connectors (Required)

Option Description
-CN1 Single 25-pin D connector, 25DU
-CN2 Two connector, 4-pin HPO and 25-pin D, 4DU-25DU
Note:
  1. -CN1 option not valid for systems using bus voltages greater than 80 V.

Mounting Plate (Opitonal)

Option Description
-MP Mounting plate

Performance Grade (Required)

Option Description
-PL1 Base performance
-PL2 High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
 
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
 
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system

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