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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

  • Compact 50 mm width with travel to 50 mm
  • Precision ground ball-screw or lead-screw drive
  • DC servo or stepper motor
  • Crossed-roller bearings
  • High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.5 µm)
  • High vacuum capable
  • Compact multi-axis configurations

High Accuracy

The precision ground ball-screw or lead screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The crossed-roller linear bearings provide smooth travel and excellent payload characteristics.

Optional Vacuum Preparation

The MPS50SL is available with optional vacuum preparation to 10-6 Torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.

Highly Configurable

An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be directly mounted to the larger MPS75SL stage.

The MPS50SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.

Dimensions

MPS50SL



MPS50SL Mounting Plates



MPS50SL HDZ Bracket



Ordering Information

MPS50SL Miniature Mechanical-Bearing Screw-Driven Linear Stage

Travel (Required)

Option Description
-025 25 mm travel stage
-050 50 mm travel stage

Drive Screw (Required)

Option Description
-BS Precision-ground ball screw, 1 mm/rev
-LSPrecision-ground lead screw, 0.5 mm/rev

Vacuum Preparation (Optional)

Option Description
-HVHigh vacuum preparation to 10-6 Torr

Motor (Required)

Option Description
-M1 DC servomotor
-M2Stepper motor

Mounting Plate (Optional)

Option Description
-MP Optical table mounting plate

Metrology (Required)

Option Description
-PL0 No metrology performance plots
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as separate line item)

Option Description
HDZ-MPS50SL Right angle bracket, MPS50SL
HDZ-MPS50SL-HV Right angle bracket, MPS50SL, high vacuum preparation to 10-6 Torr

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