- Travel lengths up to 250 mm with anti-creep crossed-roller bearings
- Optional center-mounted linear encoder for direct position feedback
- Versatile features and options enable convenient integration into a larger machine or use as a stand-alone positioning axis
- Vacuum- and cleanroom-compatible versions available
- Available with ThermoComp® for reliable performance in changing environments
Superior Motion PerformanceFeaturing anti-creep crossed-roller bearings and a precision-ground, fine-pitch ball-screw, the ATX165SL/SLE boasts excellent geometric performance and minimal angular error motion. With up to 250 mm of nominal travel, the ATX165SL/SLE offers superior minimum incremental step size and in-position stability compared to other stages that utilize recirculating ball bearings. This makes the ATX165SL/SLE ideal for many high-precision tasks such as vertical positioning of sensors and cameras, optics focusing, and beamline measurement and manipulation applications.
Linear Encoder OptionThe ATX165SLE offers an integral center-mounted linear encoder to provide direct position measurement at the stage’s moving carriage. The typical effects of backlash commonly associated with screw drives are virtually eliminated when using the linear encoder as a position feedback device. Applications that require exacting workpoint performance benefit greatly from the ATX165SL’s direct linear encoder. Options are available with either incremental (1 Vpp and digital TTL) or absolute output signals.
Design and Integration FlexibilityThe ATX165SL/SLE is designed with a variety of standard features and available options, allowing it to be easily integrated into a larger subsystem or machine, or to serve as a stand-alone positioning axis. It mounts to both metric and English optical tables and features a versatile customer mounting interface on the moving carriage to which other positioning stages or equipment can be mounted. Brushless, slotless servomotors, with or without a holding brake, as well as stepper motors, are available options. The ATX165SL/SLE can be equipped with an optional motor foldback kit in order to reduce the overall length of the stage. This is particularly useful in vertical-axis applications where space is limited. Vacuum and cleanroom-compatible variants are also available.
Mitigate Thermal Errors with ThermoComp®Temperature changes and thermal effects are often the most detrimental sources of error in precision machines, and screw drives are particularly susceptible. All ATX-series stages are available with Aerotech’s ThermoComp® feature, an integrated temperature compensation solution that delivers accurate and dependable positioning performance in the presence of thermal disturbances. It protects the stage from the effects of variable-temperature environments and friction-induced self-heating, ultimately providing stability to the user’s process, even in extreme industrial environments.
|Travel||150 mm||200 mm||250 mm|
|Accuracy(1)||SL||Uncalibrated||±8 µm||±8 µm||±9 µm|
|Calibrated(2)||±1 µm||±1 µm||±1 µm|
|SLE||Uncalibrated||±4 µm||±5 µm||±6 µm|
|Calibrated(2)||±0.4 µm||±0.5 µm||±0.5 µm|
|Resolution (Minimum Incremental Motion)||SL||
|SLE||0.025 µm (-E1 feedback option)(6)
0.1 µm (-E2 feedback option)
0.2 µm (-E3 feedback option)
|Bidirectional Repeatability(1)||SL||±0.5 µm|
|SLE||±0.15 µm||±0.2 µm||±0.25 µm|
|Horizontal Straightness(1)||±1.75 µm||±2.0 µm||±2.25 µm|
|Vertical Straightness(1)||±1.75 µm||±2.0 µm||±2.25 µm|
|Pitch||80 µrad (16 arc-sec)||85 µrad (17 arc-sec)||90 µrad (18 arc-sec)|
|Yaw||80 µrad (16 arc-sec)||85 µrad (17 arc-sec)||90 µrad (18 arc-sec)|
|Maximum Speed(5)||Servo Motor (-M1, -M2, -M5, -M6)||100 mm/s|
|Servo Motor (-M3, -M4, -M7, -M8)||130 mm/s|
|Stepper Motor (-M9)||25 mm/s|
|Load Capacity||Horizontal||40 kg|
|Vertical (Axial)||20 kg|
|Moving Mass||3.4 kg||3.8 kg||4.1 kg|
|Stage Mass (No Motor)||12.3 kg||13.7 kg||15.0 kg|
- Certified with each stage.
- Available with Aerotech controllers.
- Achieved with Aerotech rotary motor with amplified sine encoder. Specification is unidirectional.
- Achieved with Aerotech rotary motor with 10,000 lines/rev digital encoder. Specification is unidirectional.
- Requires the selection of an appropriate amplifier with sufficient voltage and current.
- Requires motor with 1 Vpp amplified sine encoder (-M3, -M4, -M7, -M8 motor options) and linear amplifier.
- Specifications listed are valid for non-foldback kit options. Contact factory for specifications when a foldback kit option (-FBx) is ordered.
|Drive System||Brushless Rotary Servomotor (-M1 through -M8)
Stepper Motor (-M9)
|Feedback (Linear Encoder - SLE Version Only)||Incremental: 1 Vpp (-E1 feedback option) or 0.05 μm TTL (-E2 feedback option)
Absolute: EnDat 2.2 (-E3 feedback option)
|Feedback (Rotary Encoder)||
Incremental: 10,000-Line TTL (-M1, -M2, -M5, -M6 motor options)
|Maximum Bus Voltage||320 VDC|
|Limit Switches||5 V, Normally Closed|
ATX165SL/SLE Series Mechanical-Bearing, Screw-Driven Linear Stage
Direct Linear Feedback (Required)
|SL||No direct linear feedback|
|SLE-E1||Incremental linear encoder, 1 Vpp|
|SLE-E2||Incremental linear encoder, 0.05 µm digital TTL output|
|SLE-E3||Absolute linear encoder|
|-150||150 mm travel|
|-200||200 mm travel|
|-250||250 mm travel|
|-M1||BMS60 brushless servomotor and 10,000-line TTL encoder|
|-M2||BMS60 brushless servomotor, 10,000-line TTL encoder, and brake|
|-M3||BMS60 brushless servomotor and 1000-line 1 Vpp encoder|
|-M4||BMS60 brushless servomotor, 1000-line 1 Vpp encoder, and brake|
|-M5||BM75 brushless servomotor and 10,000-line TTL encoder|
|-M6||BM75 brushless servomotor, 10,000-line TTL encoder, and brake|
|-M7||BM75 brushless servomotor and 1000-line 1 Vpp encoder|
|-M8||BM75 brushless servomotor, 1000-line 1 Vpp encoder, and brake|
|-M9||SM60 stepper motor, high voltage|
Foldback Kit (Optional)
|-FB1||Foldback kit for .250 inch diameter shaft NEMA 23 motor (standard)|
|-FB2||Foldback kit for .375 inch diameter shaft NEMA 23 motor|
Motor Orientation (Optional)
|-2||Bottom cable exit, optional orientation|
|-3||Left-side cable exit, standard orientation|
|-5||Right-side cable exit, optional orientation|
|-8||Right-side foldback, standard orientation|
|-9||Right-side foldback with bottom cable exit, optional orientation|
|-12||Left-side foldback, optional orientation|
|-13||Left-side foldback with bottom cable exit, optional orientation|
|-CP1||Coupling for 0.250 inch diameter shaft|
|-CP2||Coupling for 0.375 inch diameter shaft, required for BMS100/BM130 motor|
Lifting Hardware (Optional)
|-TCMP||ThermoComp integrated thermal compensation|
|-PL1||Metrology, uncalibrated with performance plots|
|-PL2||Metrology, calibrated (HALAR) with performance plots|
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
|-TAS||Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
|-TAC||Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.