- Compact stage with travels to 100 mm
- Low-thermal expansion glass-scale linear encoder
- Precision-ground ball-screw drive
- DC servo or stepper motor
- Anti-creep crossed-roller bearings
- High resolution (0.025 µm), repeatability (±0.1 µm) and accuracy (±0.75 µm)
- Optional bellows waycovers
- Compact multi-axis configurations
Aerotech’s MPS75SLE is a compact, high-performance linear positioning stage offering the benefits of direct measurement feedback via a linear encoder. The MPS75SLE is the ideal high-accuracy stage for applications in optics positioning, z-axis positioning of sensors in surface metrology, or high-precision alignment. Multi-axis stage configurations can easily be assembled with other MPS linear and rotary stages using the multitude of adapter brackets and mounting compatibility inherent in the entire MPS stage family.
The precision ground, preloaded ball-screw coupled with the linear encoder provide outstanding accuracy, repeatability and a positioning resolution capability to 25 nm. The anti-creep crossed-roller bearings provide exceptionally smooth travel and high-load capacity in a compact package.
Unlike competitive designs using steel (13 ppm/˚C) or glass scales with 8 ppm/˚C thermal expansion coefficients, the MPS75SLE is available with a low thermal expansion (3.3 ppm/˚C) precision glass scale allowing for high-accuracy and repeatable positioning over long periods of time. The linear encoder is available with amplified sine (1 Vpp) or 50 nm TTL digital outputs allowing for easy integration with all standard controllers.
The MPS75SLE motor options include a DC servomotor with a high-resolution rotary encoder or a stepper motor. Just like the MPS75SL, the SLE is available with and without optional bellows waycovers.
An optional mounting plate provides direct mounting to both English and metric optical breadboards. The inherent mounting compatibility of all MPS stages allows for simple mounting in multi-axis arrangements.
|Travel||25 mm||50 mm||75 mm||100 mm|
|Accuracy||Standard||±1.75 µm||±2.25 µm||±2.75 µm||±3.25 µm|
|HALAR(1)||±0.75 µm||±0.75 µm||±1.0 µm||±1.0 µm|
|Resolution (Minimum Incremental Motion)(2)
|Repeatability (Bidirectional)(2)||±0.1 µm|
|Straightness||±2.0 µm||±2.0 µm||±3.0 µm||±3.0 µm|
|Flatness||±2.0 µm||±2.0 µm||±3.0 µm||±3.0 µm|
|Maximum Speed||1.0 mm/rev
|DC Motor||50 mm/s||50 mm/s||50 mm/s||35 mm/s|
|SM Motor||30 mm/s||30 mm/s||30 mm/s||30 mm/s|
|Load Capacity(3)||Horizontal||15 kg|
|Stage Mass||2.3 kg||2.4 kg||2.5 kg||2.6 kg|
|Material||Anodized Aluminum Body|
- Available with Aerotech controllers.
- Resolution and repeatability specifications are for systems running in dual-loop mode with feedback resolutions of 25 nm on both the rotary and linear encoders.
- Payload specifications are single-axis.
- Specifications are for single-axis systems measured 25 mm above the tabletop.
- Contact factory for specifications of stages with bellows option.
|Model||DC Motor (Standard and VAC)||SM Motor (Standard and VAC)|
|Drive System||DC Brush Servomotor||24 VDC Bipolar Stepper Motor|
|Feedback (Linear Encoder)
||Noncontact Linear Encoder (LT);
Amplified sine (-AS) and TTL (50 nm) versions available
|Feedback (Rotary Motor Encoder)||10,000 lines/rev Rotary Encoder||N/A|
|Maximum Bus Voltage||48 VDC(1)|
|Rotary Encoder Electronic Resolution||0.025 µm||0.025 µm @ 40,000 steps/rev Motor Resolution|
|Linear Encoder Electronic Resolution||20 µm fundamental, 0.05 µm with LTX100 option;
Amplified Sine (-AS) option allows for electronic resolutions below 1 nm(2)
|Limit Switches||5V, Normally Closed|
- With Aerotech control system.
- For optimum performance, Aerotech recommends using 0.025 µm as the highest-resolution when using the linear encoder as part of the servo feedback loop (e.g., dual-loop).
|Model||DC Motor and SM Motor|
|Multi-Axis||A3200||Npaq/Npaq MR/Ndrive MP|
|Ensemble||Ensemble LAB/Epaq/Epaq MR/Ensemble MP|
|Single Axis||Soloist||Soloist MP
MPS75SLE Series Ball-Screw Stage with Linear Encoder
|-025||25 mm travel stage with ball screw, linear encoder and limits|
|-050||50 mm travel stage with ball screw, linear encoder and limits|
|-075||75 mm travel stage with ball screw, linear encoder and limits|
|-100||100 mm travel stage with ball screw, linear encoder and limits|
|-LTAS||Amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier|
|-LTX100||0.05 µm line driver output|
|-TTM||Metric pattern/thread tabletop|
|-B1MM||1 mm/rev precision-ground ball screw|
|-DC||DC servomotor with 3 meter integral cable|
|-SM||Stepping motor with 3 meter integral cable|
|-NC-5V||5 V normally-closed limits|
|-MP||Breadboard mounting plate|
|-PLOTS||Accuracy and repeatability plots|
|-NO PLOTS||No performance plots|
Accessories (to be ordered as separate line item)
|HALAR||High-accuracy system – error correction for accuracy and repeatability|