- 0.01 arc sec resolution
- 0.005 arc sec in-position stability
- Outstanding error motion specifications
- Multi-axis configurations
- High dynamic performance
- Both limited and unlimited rotation
The ANT95R direct-drive rotary stages are designed as part of Aerotech’s nano Motion Technology product family. Our rotary stages offer unprecedented in-position stability (0.005 arc sec) and sub 0.01 arc-sec incremental motion performance, and are offered in two grades of accuracy.
The ANT95R series is designed for compatibility and easy integration with Aerotech's ANT linear stage product offerings. Together these stages provide accuracy, stability and small size performance capability for almost any nanomanufacturing or inspection application.
In addition to the high precision levels, these systems offer high dynamic performance and throughput ideal for processes that require speed and precision.
The ANT95R stage series was designed to operate in a 24/7 manufacturing environment. Unlike other rotary devices, the ANT95-R requires no periodic maintenance, assuring years of trouble-free operation.
ANT95-R Series Specifications
|Rotation Angle||20°||180°||±360° Continuous|
|Accuracy(1)||BASE||10 arc sec||10 arc sec||10 arc sec|
|PLUS||3 arc sec||3 arc sec||3 arc sec|
|Resolution (Minimum Incremental Motion)||0.01 arc sec||0.01 arc sec||0.01 arc sec|
|Bidirectional Repeatability(1)||1.5 arc sec||1.5 arc sec||1.5 arc sec|
|Unidirectional Repeatability||0.5 arc sec||0.5 arc sec||0.5 arc sec|
|Tilt Error Motion||Synchronous||N/A||N/A||10 arc sec|
|Asynchronous||N/A||N/A||3 arc sec|
|Axial Error Motion(1)||Synchronous||N/A||N/A||2 µm|
|Radial Error Motion(1)||Synchronous||N/A||N/A||3 µm|
|Maximum Speed||20 rpm||20 rpm||200 rpm|
|Maximum Acceleration||400 rad/s2||400 rad/s2||400 rad/s2|
|In-Position Stability(2)||0.005 arc sec||0.005 arc sec||0.005 arc sec|
|Aperture||11 mm||11 mm||11 mm|
|Maximum Torque (Continuous)||0.2 N-m||0.2 N-m||0.2 N-m|
|Load Capacity(3)||Axial||2.0 kg||2.0 kg||2.0 kg|
|Radial||1.5 kg||1.5 kg||1.5 kg|
|Moment||2 N-m||2 N-m||2 N-m|
|Rotor Inertia (Unloaded)||0.00065 kg-m2||0.00066 kg-m2||0.00069 kg-m2|
|Stage Mass||1.2 kg||1.2 kg||1.2 kg|
|Material||Aluminum Body/Black Hardcoat Finish|
|MTBF (Mean Time Between Failure)||30,000 Hours|
- Certified with each stage. Requires the use of an Aerotech controller.
- In-Position Jitter listing is 3 sigma value.
- Axis orientation for on-axis loading is listed.
- Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
- All error motion specifications are measured at 60 rpm.
- For high-speed operation customer payload must be balanced to G1.0 per ISO 1940.
|Drive System||Slotless, Brushless, Direct-Drive Rotary Motor|
|Feedback||Noncontact Rotary Encoder|
|Maximum Bus Voltage||±40 VDC|
|Limit Switches||5 V, Normally Closed|
|Home Switch||Near Center|
|Single Axis||Soloist||Soloist ML-MXH|
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25ºC/24 hours. If this is not possible alternate products are available. Please consult Aerotech for more information.
ANT95R Single-Axis Rotary Direct-Drive Nanopositioning Stage
|-20||Limited travel, ±10 degrees|
|-180||Limited travel, ±90 degrees|
Mounting Plate (Optional)
Performance Grade (Required)
|-PL2||High-accuracy performance, PLUS|
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
|-TAS||Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
|-TAC||Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.