- 600 mm, 1000 mm, 1500 mm travel sizes
- 685 mm square carriage
- 910 kg load capacity
- an be vacuum 10-6 Torr rated
- Bellows covers to protect from particles, laser slag
- Accuracy ±8 µm calibrated, ±50 µm uncalibrated
- Air purge for positive air pressure
|Accuracy||LT Standard||±40.0 µm|
|Pitch||±121 µrad (±25 arc sec)|
|Roll||±121 µrad (±25 arc sec)|
|Yaw||±121 µrad (±25 arc sec)|
|Dynamic||Maximum Speed(2)||200 mm/s|
|Load Capacity(3)||Axial||910 kg|
||120 kg (1000 mm travel with motor)
|Material||Aluminum body/stage; hardcoated tabletop
- Available with Aerotech controllers.
- Speed and acceleration dependent on load.
- Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.