Skip to content
Compare
Close

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

  • Nanometer-level performance in a large travel format
  • High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm)
  • In-position stability of <1 nm
  • Anti-creep crossed-roller bearings
  • High dynamic performance
  • Large selection - 8 models in travel and accuracy

Noncontact Direct-Drive

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ANT130L to a peak unloaded acceleration of 1 g and a maximum velocity of 350 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven or other stages in its class.

Outstanding Resolution

For alignment applications, outstanding step-to-step resolution is critical. The ANT130L meets this demand with an incremental step size of 1 nm when coupled with Aerotech drives and controls. The direct-drive linear motor allows the ANT130L to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.

Designed for Long Life

Like all stages in the Aerotech product family, the ANT130L was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices, which means they not only exhibit long-life but are totally maintenance free.

Precision Alignment

ANT130L series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and vertical axis solutions.

Dimensions

ANT130L



ANT130L Mounting Plate



Ordering Information

ANT130L Single-Axis-Direct-Drive Nanopositioning Stage

Travel (Required)

Option Description
-035 35 mm travel
-060 60 mm travel
-110 110 mm travel
-160 160 mm travel

Connectors (Required)

Option Description
-CN1 Single 25-pin D connector, 25DU
-CN2 Two connectors, 4-pin HPD and 25-pin D, 4DU-25DU
Note:
  1. CN1 option not valid for systems using bus voltages greater than 80 V

Mounting Plate (Optional)

Option Description
-MP Mounting plate

Performance Grade (Required)

Option Description
-PL1 Base Performance
-PL2 High-Accuracy Performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Related Products