Skip to content




Ordering Info



Path 7




Ordering Info



Design Features

  • Integrated low-profile XY linear motor stage
  • Nanometer-level performance in a large travel format
  • High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm)
  • In-position stability of <1 nm
  • Anti-creep crossed-roller bearings
  • High dynamic performance with direct-drive technology
  • ULTRA performance grade option

Ultra-Precise Stage Design

The ANT130XY design allows critical elements such as orthogonality, straightness, and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. All travel options (60 mm x 60 mm, 110 mm x 110 mm, 160 mm x 160 mm) come with the 85 mm profile height. The integrated cable management system is designed for long life and to minimize drag forces.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate, and high-speed positioning necessary for mass production of precision devices. ANT130XY stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high speed, high resolution, and high accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion.

Multi-Axis Configurations

The ANT130XY can be combined with other Aerotech ANT series products (vertical lift stages, direct-drive rotaries, and goniometers) to create unique, high performance, multi-axis systems.

ULTRA Performance Grade Option

In order to achieve the highest possible system accuracy from our multi-axis nanopositioning systems, Aerotech has developed an advanced, dynamic trajectory calibration system. To take advantage of this sophisticated calibration system, the mechanical system has to be completely assembled, functionally tested, and calibrated in our best-in-class metrology labs. Nanometer-level system accuracy can only be achieved under stringent environmental conditions, calibrating with the best test equipment, using the highest-precision mechanical elements, and utilizing the ULTRA software capabilities of Aerotech’s industry-leading controls. By implementing ULTRA dynamic trajectory calibration with the ANT130XY, we are able to produce guaranteed two-dimensional accuracies of ±250 nm or better.

The plots provided in the specifications illustrate performance differences between a standard ANT130XY and the ULTRA version. Straightness errors, orthogonality errors, and accuracy errors caused by stage yawing are virtually eliminated.



Mounting Plate

CMS Post

Ordering Information

ANT130XY Two-Axis XY Direct-Drive Nanopositioning Stage

Travel (Required)

Option Description
-060 60 mm travel
-110 110 mm travel
-160 160 mm travel

Connectors (Required)

Option Description
-CN1 Single 25-pin D connector, 25DU
-CN2 Two connector, 4-pin HPD and 25-pin D, 4DU-25DU
  1. -CN1 option not valid for systems using bus voltages greater than 80 V

Cable Management (Required)

Option Description
-CMS2 Post for two-axis cable support
-CMS3 Post for three-axis cable support

Mounting Plate (Required)

Option Description
-MP Mounting plate

Performance Grade (Required)

Option Description
-PL1 Base performance
-PL3 High-accuracy performance, PLUS
-PL4 Ultra high-accuracy performance, ULTRA

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Related Products