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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

  • Achieves minimum incremental motion to 1 nm
  • Delivers nanometer-level positioning performance over travel lengths up to 100 mm
  • Provides ultra-low profile with dual side-mounted counterbalances capable of offsetting up to 5 kg payload for ultra-precise performance in the vertical direction
  • Features high-precision crossed-roller bearings for excellent dynamic performance & generous load capacity
  • Maximizes process throughput & reliability with ironless direct-drive linear motor

Key Applications

ANT95LZS is ideal for multi-axis applications that require high precision and dynamic positioning performance, including:

  • Photonics assembly & inspection
  • Fiber alignment & optimization
  • Optics manufacturing, testing & inspection
  • Sensor testing & qualification
  • Semiconductor processing & inspection
  • Research & laboratory applications

Industry-Leading Motion Performance

Outstanding accuracy, position repeatability and in-position stability require extremely fine system resolution. Available with an improved high-performance encoder option, ANT95LZS can easily achieve minimum incremental steps of 1 nm. Our direct-drive technology exhibits no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion. Plus, the minimally-influencing counterbalance design opposes the gravitational forces induced by your payload, resulting in industry-leading performance and optimum thermal stability.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95LZS stages use our advanced direct-drive technology to achieve the highest level of positioning performance. This direct-drive technology delivers ultra-smooth, consistent motion with outstanding dynamic characteristics to optimize your process throughput. The unique drive and bearing combination, packaged in an extremely compact form factor, offers tangible advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT95LZS family has universal mounting and tabletop patterns that allow for easy system integration. The low-profile design makes these stages ideal for mounting to bridges and gantries. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations. ANT95LZS stages are easily combined with other products -- including ANT95L, ANT95XY, ANT95R, ANT95V, ANT20G and more -- to achieve complex, multiple degree-of-freedom motion and positioning solutions.

Dimensions

ANT95LZS



Ordering Information

Travel (Required)

Option Description
-02525 mm travel
-05050 mm travel
-07575 mm travel
-100100 mm travel

Feedback (Required)

Option Description
-E1Incremental linear encoder, 1 Vpp amplified sine output
-E2Incremental linear encoder, digital RS422 output, 5 nm electrical resolution
-E4Incremental linear encoder, 1 Vpp amplified sine output, high-performance

Mounting Plate (Optional)

Option Description
-MPMounting Plate

Performance Grade (Required)

Option Description
-PL1Base Performance
-PL2High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TASIntegration - Test as system

Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components

Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

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