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ANT20G Single-Axis Direct-Drive Goniometer

Design Features Noncontact, non-cogging, frictionless direct-drive for zero backlash or hysteresis High speed (150 degrees/s) High resolution (0.05 arc sec) Excellent in-position stability Large 20 degree rotation angle Orthogonal mounting of two cradles provides rotation about the same point No...

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ANT95V-3 Single-Axis Lift Direct-Drive Nanopositioning Stage

Design Features Nanometer performance with 3 mm vertical travel High resolution (1 nm), repeatability (100 nm) and accuracy (200 nm) In-position stability of <1 nm Anti-creep crossed-roller bearings High dynamic performance Noncontact Direct-Drive All of the original ANT series' direct-drive...

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ANT130V-5 Single-Axis Lift Direct-Drive Nanopositioning Stage

Design Features Nanometer performance with 5 mm vertical travel High resolution (2 nm), repeatability (100 nm) and accuracy (200 nm) In-position stability of <2 nm Anti-creep crossed-roller bearings High dynamic performance Noncontact Direct-Drive Design All of the original ANT series’...

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ANT130L Single-Axis Linear Nanopositioning Stages

Design Features Enhanced second-generation design Delivers nanometer-level positioning performance over travel lengths up to 210 mm - NEW Achieves minimum incremental motion to 0.5 nm - NEW Features high-precision crossed-roller bearings for excellent dynamic performance & ample load capacity Maximizes...

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ANT95R Series Single-Axis Rotary Direct-Drive Nanopositioning Stages

Design Features 0.01 arc sec resolution 0.005 arc sec in-position stability Outstanding error motion specifications Multi-axis configurations High dynamic performance Both limited and unlimited rotation Multi-Axis Capabilities The ANT95R series is designed for compatibility and easy integration with Aerotech's ANT...

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ANT95L Single-Axis Linear Nanopositioning Stages

Design Features Enhanced second-generation design Achieves minimum incremental motion to 0.5 nm - NEW Delivers nanometer-level positioning performance over travel lengths up to 100 mm Features high-precision crossed-roller bearings for excellent dynamic performance & generous load capacity Optimizes process throughput...

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ANT130LZS Low-Profile Z Nanopositioning Stages

Design Features Enhanced second-generation design Achieves minimum incremental motion to 1 nm - NEW Delivers nanometer-level positioning performance over travel lengths up to 160 mm Provides ultra-low profile with dual side-mounted counterbalances capable of offsetting up to 14 kg payload...

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ANT95XY Two-Axis XY Nanopositioning Stages

Design Features Enhanced second-generation design Achieves minimum incremental motion to 0.5 nm - NEW Optimizes orthogonality, straightness & flatness with integrated XY design Guarantees two-dimensional accuracy of ±250 nm or better with ULTRA calibration option Features high-precision crossed-roller bearings for...

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ANT95LZ Single-Axis Z Nanopositioning Stages

Design Features Enhanced second-generation design Achieves minimum incremental motion to 1 nm - NEW Delivers nanometer-level positioning performance over travel lengths up to 50 mm Offsets payloads up to 5 kg for precise performance in the vertical direction with user-adjustable,...

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ANT130XY Two-Axis XY Nanopositioning Stages

Design Features Enhanced second-generation design Achieves minimum incremental motion to 0.5 nm - NEW Optimizes orthogonality, straightness & flatness with integrated XY design Guarantees two-dimensional accuracy of ±225 nm or better with ULTRA calibration option Features high-precision crossed-roller bearings for...

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ANT130LZ Single-Axis Z Nanopositioning Stages

Design Features Enhanced second-generation design Achieves minimum incremental motion to 1 nm - NEW Delivers nanometer-level positioning performance over travel lengths up to 60 mm Offsets payloads up to 10 kg for precise performance in the vertical direction with user-adjustable,...

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ANT130R Single-Axis Rotary Direct-Drive Nanopositioning Stages

Design Features 0.01 arc sec resolution 0.005 arc sec in-position stability Available with both limited and unlimited rotation Outstanding error motion specifications Multi-axis configurations High dynamic performance Multi-Axis Capabilities The ANT130R series is designed for compatibility and easy integration with...

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ANT180L Single-Axis Direct-Drive Nanopositioning Stage

Design Features Noncontact, non-cogging, frictionless direct-drive Zero backlash or hysteresis High resolution, repeatability and accuracy Anti-creep crossed-roller bearings Travel to 360 mm Integral cable management for multi-axis systems Noncontact Direct-Drive The ANT180L is driven by a high-power linear motor with...

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ANT95LZS Low-Profile Z Nanopositioning Stages

Design Features Achieves minimum incremental motion to 1 nm Delivers nanometer-level positioning performance over travel lengths up to 100 mm Provides ultra-low profile with dual side-mounted counterbalances capable of offsetting up to 5 kg payload for ultra-precise performance in the...

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