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ANT130V-5 Single-Axis Lift Direct-Drive Nanopositioning Stage

Key Features Delivers nanometer-level positioning performance over 5 mm of vertical travel Ironless direct-drive linear motor maximizes process throughput & provides high-dynamic performance Anti-creep crossed-roller bearings minimize geometric errors & provide ultra-smooth motion Robust design ensures excellent reliability in both...

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ANT130XY Two-Axis XY Nanopositioning Stages

Design Features Enhanced second-generation design Achieves minimum incremental motion to 0.5 nm - NEW Optimizes orthogonality, straightness & flatness with integrated XY design Guarantees two-dimensional accuracy of ±225 nm or better with ULTRA calibration option Features high-precision crossed-roller bearings for...

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ANT130LZ Single-Axis Z Nanopositioning Stages

Design Features Enhanced second-generation design Achieves minimum incremental motion to 1 nm - NEW Delivers nanometer-level positioning performance over travel lengths up to 60 mm Offsets payloads up to 10 kg for precise performance in the vertical direction with user-adjustable,...

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ANT130L Single-Axis Linear Nanopositioning Stages

Design Features Enhanced second-generation design Delivers nanometer-level positioning performance over travel lengths up to 210 mm - NEW Achieves minimum incremental motion to 0.5 nm - NEW Features high-precision crossed-roller bearings for excellent dynamic performance & ample load capacity Maximizes...

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ANT95XY Two-Axis XY Nanopositioning Stages

Design Features Enhanced second-generation design Achieves minimum incremental motion to 0.5 nm - NEW Optimizes orthogonality, straightness & flatness with integrated XY design Guarantees two-dimensional accuracy of ±250 nm or better with ULTRA calibration option Features high-precision crossed-roller bearings for...

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ANT130LZS Low-Profile Z Nanopositioning Stages

Design Features Enhanced second-generation design Achieves minimum incremental motion to 1 nm - NEW Delivers nanometer-level positioning performance over travel lengths up to 160 mm Provides ultra-low profile with dual side-mounted counterbalances capable of offsetting up to 14 kg payload...

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FiberAlign FA95e and FA130e Series Direct-Drive, Multi-Axis Photonics Alignment System

Design Features 3- to 6-axis photonics alignment High resolution (2 nm), repeatability (100 nm), and accuracy (300 nm) Anti-creep crossed-roller bearings Noncontact direct-drive linear motors Direct-drive rotary and goniometer options Raster, spiral, or power peaking algorithms Interface to industry-standard power...

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ANT95R Series Single-Axis Rotary Direct-Drive Nanopositioning Stages

Key Features Offers best-in-class resolution & in-position stability Outstanding error motion performance Ironless, direct-drive motor eliminates velocity ripple & cogging effects Continuous- & limited-rotation configurations available Clear aperture for cable or hose feedthrough Easily combine with other Aerotech ANT-series stages...

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ANT95LZ Single-Axis Z Nanopositioning Stages

Design Features Enhanced second-generation design Achieves minimum incremental motion to 1 nm - NEW Delivers nanometer-level positioning performance over travel lengths up to 50 mm Offsets payloads up to 5 kg for precise performance in the vertical direction with user-adjustable,...

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ANT95L Single-Axis Linear Nanopositioning Stages

Design Features Enhanced second-generation design Achieves minimum incremental motion to 0.5 nm - NEW Delivers nanometer-level positioning performance over travel lengths up to 100 mm Features high-precision crossed-roller bearings for excellent dynamic performance & generous load capacity Optimizes process throughput...

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ANT95LZS Low-Profile Z Nanopositioning Stages

Design Features Achieves minimum incremental motion to 1 nm Delivers nanometer-level positioning performance over travel lengths up to 100 mm Provides ultra-low profile with dual side-mounted counterbalances capable of offsetting up to 5 kg payload for ultra-precise performance in the...

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ANT130R Single-Axis Rotary Direct-Drive Nanopositioning Stages

Key Features Offers best-in-class resolution & in-position stability Outstanding error motion performance Ironless, direct-drive motor eliminates velocity ripple & cogging effects Continuous- & limited-rotation configurations available Clear aperture for cable or hose feedthrough Easily combine with other Aerotech ANT-series stages...

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